1
Martin E Lee: Window frame-guided stage mechanism. Nikon Corporation, Norman R Klivans, Skjerven Morrill MacPherson Franklin & Friel, February 23, 1999: US05874820 (410 worldwide citation)

A guided stage mechanism suitable for supporting a reticle in a photolithography machine includes a stage movable in the X-Y directions on a base. Laterally surrounding the stage is a rectangular window frame guide which is driven in the X-axis direction on two fixed guides by means of motor coils o ...


2
Martin E Lee: Window frame-guided stage mechanism. Nikon Corporation, Oliff & Berridge, May 20, 2004: US20040095085-A1

A guided stage mechanism suitable for supporting a reticle in a photolithography machine includes a stage movable in the X-Y directions on a base. Laterally surrounding the stage is a rectangular window frame guide which is driven in the X-axis direction on two fixed guides by means of motor coils o ...