1
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. Edwards, January 27, 2009: US07481867 (8 worldwide citation)

A vacuum system for extracting a stream of a multi-phase fluid from a photolithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phase ...


2
Harpham Andrew John, Shechter Paul John, Stockman Paul Alan: Vacuum system for immersion photolithography. The Boc Group, Harpham Andrew John, Shechter Paul John, Stockman Paul Alan, BOOTH Andrew Steven, December 29, 2005: WO/2005/124464 (6 worldwide citation)

A vacuum system (30) for extracting a stream of a multi-phase fluid from a photo­lithography tool comprises a pumping arrangement (36, 38) for drawing the fluid from the tool, and an extraction tank (32) located upstream from the pumping arrangement for separating the fluid drawn from the tool into ...


3
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, April 24, 2012: US08164734 (5 worldwide citation)

A vacuum system for extracting a stream of a multi-phase fluid from a photo-lithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phas ...


4
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, September 9, 2014: US08830440 (3 worldwide citation)

A vacuum system for extracting a stream of a multi-phase fluid from a photolithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phase ...


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Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. ASML NETHERLANDS, Pillsbury Winthrop Shaw Pittman, January 2, 2018: US09857699 (1 worldwide citation)

A vacuum system for extracting a stream of a multi-phase fluid from a photo-lithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phas ...


7
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, January 1, 2019: US10168624

A vacuum system for extracting a stream of a multi-phase fluid from a photolithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phase ...


8
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. ASML NETHERLANDS, Pillsbury Winthrop Shaw Pittman, November 29, 2016: US09507270

A vacuum system for extracting a stream of a multi-phase fluid from a photo-lithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phas ...


9
Harpham Andrew John, Shechter Paul John, Stockman Paul Alan: Vacuum system for immersion photolithography. Boc Group, February 28, 2007: EP1756672-A2

A vacuum system for extracting a stream of a multi-phase fluid from a photolithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phase ...


10
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. Ira Lee Zebrak, The BOC Group, December 22, 2005: US20050282405-A1

A vacuum system for extracting a stream of a multi-phase fluid from a photolithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phase ...