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Loopstra Erik Roelof, Bonnema Gerrit M, Van Der Schoot Harmen K, Veldhuis Gerjan P, Ter Beek Paulus Martinus Henricus: Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such positioning device. Asml Netherlands, December 24, 2004: JP2004-363619 (2 worldwide citation)

PROBLEM TO BE SOLVED: To provide a positioning device which has a first displacement unit for displacing a first object holder and a second displacement unit for displacing a second object holder, in which interference of the two displacement units are prevented.SOLUTION: The object holders can be d ...


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Loopstra Erik Roelof, Bonnema Gerrit Maarten, Van Der, Schoot Harmen Klaas, Veldhuis Gerjan Peter, Ter, Beek Paulus Martinus Henricus: Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device. Koninklijke Philips Electronics, Philips Norden, Asm Lithography, WOLFS Marc J M, July 2, 1998: WO/1998/028665

A positioning device (3, 97, 179) with a first displacement unit (25, 189) for displacing a first object holder (11, 181) and a second displacement unit (27, 191) for displacing a second object holder (13, 183). The object holders can be displaced by the positoning device alternately from a measurin ...


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Loopstra Erik Roelof, Bonnema Gerrit Maarten, Schoot Harmen Klaas Van Der, Veldhuis Gerjan Peter, Ter Beek Paulus Martinus Henri: Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device. Koninkl Philips Electronics, January 13, 1999: EP0890136-A1

A positioning device (3, 97, 179) with a first displacement unit (25, 189) for displacing a first object holder (11, 181) and a second displacement unit (27, 191) for displacing a second object holder (13, 183). The object holders can be displaced by the positioning device alternately from a measuri ...