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Jennings Thomas A: Thin film coils and method and apparatus for making the same. Hull Corporation, Olson Oliver D, January 15, 1974: US3785046 (26 worldwide citation)

Thin film inductance coils, separately or in transformer combinations, are made by depositing on a substrate from vapor sources directed through selected apertured masks, superimposed layers of alternate films of electrically conductive metal and electrical insulating material in successive segments ...


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Thin film coils and method and apparatus for making the same. Hull, April 26, 1973: GB1315011-A

1315011 Forming inductance coils by evaporation or sputtering HULL CORP 25 Aug 1970 [6 March 1970] 40856/70 Heading C7F [Also in Division H1] Vapour deposition or sputtering apparatus comprises a substrate support 24, heated by an electric heater 30, heated crucibles 34, 36 to vapourize the metal an ...


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