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Shibazaki Yuichi: (Ja) ステージ駆動方法及びステージ装置、露光装置、並びにデバイス製造方法, (En) Stage drive method and stage drive apparatus, exposure apparatus, and device producing method. Nikon Corporation, Shibazaki Yuichi, TATEISHI Atsuji, August 11, 2005: WO/2005/074014 (123 worldwide citation)

(EN) When a stage state is changed from a first state where one stage (WST1 (or WST2)) is positioned at a first region directly under a projection optical system (PL), to which liquid (Lq) is supplied, to a second state where the other stage (WST2 (or WST1)) is positioned at the first region, both s ...


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Shibazaki Yuichi: Stage drive method and stage drive apparatus, exposure apparatus, and device producing method. Nippon Kogaku, October 18, 2006: EP1713113-A1 (109 worldwide citation)

When a transition from a first state where one stage (WST1 (or WST2)) is positioned at a first area directly below projection optical system (PL) to which liquid (Lq) is supplied to a state where the other stage (WST2 (or WST1)) is positioned at the first area, both stages are simultaneously driven ...


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Shibazaki Yuichi: Stage drive method and stage drive apparatus, exposure apparatus, and device producing method. Nippon Kogaku, Ren Mowen, March 31, 2010: CN200910168994

The present invention relates to a stage drive method and stage drive apparatus, an exposure apparatus and a device producing method, wherein the explosure apparatus exposes a substrate through a projection optical system and liquid. The invention is characterized by comprising the following compone ...


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Shibazaki Yuichi: Stage drive method and stage drive apparatus, exposure apparatus, and device producing method. Nippon Kogaku, ren mowen, February 21, 2007: CN200580002269

When a stage state is changed from a first state where one stage (WST1 (or WST2)) is positioned at a first region directly under a projection optical system (PL), to which liquid (Lq) is supplied, to a second state where the other stage (WST2 (or WST1)) is positioned at the first region, both stages ...


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Shibazaki Yuichi: Stage drive method and stage drive apparatus, exposure apparatus, and device producing method. Nikon Corporation, November 27, 2006: KR1020067012095

When a stage state is changed from a first state where one stage (WST1 (or WST2)) is positioned at a first region directly under a projection optical system (PL), to which liquid (Lq) is supplied, to a second state where the other stage (WST2 (or WST1)) is positioned at the first region, both stages ...


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