1
Larry J Hornbeck: Spatial light modulator and method. Texas Instruments Incorporated, James C Kesterson, James T Comfort, Melvin Sharp, October 29, 1991: US05061049 (718 worldwide citation)

An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes (40, 41) which gives uniform large-angle deflection plus high reliability.


2
Larry J Hornbeck, William E Nelson: Spatial light modulator and method. Texas Instruments Incorporated, James C Kesterson, B Peter Barndt, Richard L Donaldson, March 17, 1992: US05096279 (511 worldwide citation)

A method of resetting deflectable pixels of a spatial light modulator is disclosed. A pulse train of voltage is applied to the device to cause it to mobe from its deflected position.


3
Larry J Hornbeck: Spatial light modulator and method. Texas Instruments Incorporated, Carlton H Hoel, Robert O Groover, James T Comfort, January 28, 1986: US04566935 (488 worldwide citation)

Methods of fabrication of spatial light modulators with deflectable beams by plasma etching after dicing of a substrate into chips, each of the chips an SLM, is disclosed. Also, various architectures available with such plasma etching process are disclosed and include metal cloverleafs for substrate ...


4
Larry J Hornbeck: Spatial light modulator and method. Texas Instruments Incorporated, Carlton H Hoel, Leo N Heiting, Melvin Sharp, May 5, 1987: US04662746 (481 worldwide citation)

An electrostatically deflectable beam spatial light modulator with the beam composed of two layers of aluminum alloy and the hinge connecting the beam to the remainder of the alloy formed in only one of the two layers; this provides a thick stiff beam and a thin compliant hinge. The alloy is on a sp ...


5
Larry J Hornbeck: Spatial light modulator and method. Texas Instruments Incorporated, Carlton H Hoel, Leo N Heiting, Melvin Sharp, December 1, 1987: US04710732 (461 worldwide citation)

Spatial light modulators with deflectable metal flaps hinged to conducting posts on a substrate are disclosed. The metal flaps and conducting post may be a single piece, and connected to addressing circuitry in the substrate. Also, plasma etching to fabricate the flaps without breakage is disclosed.


6
Larry J Hornbeck: Spatial light modulator and method. Texas Instruments Incorporated, Dana L Burton, Richard A Stoltz, Richard L Donaldson, December 15, 1992: US05172262 (351 worldwide citation)

An electrostatically deflectable beam spatial light modulator with the beam composed of two layers of aluminum alloy and the hinge connecting the beam to the remainder of the alloy formed in only one of the two layers; this provides a thick stiff beam and a thin compliant hinge. The alloy is on a sp ...


7
Hornbeck Larry J, Nelson William E: Spatial light modulator and method.. Texas Instruments, March 20, 1991: EP0417523-A2 (53 worldwide citation)

An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes (40, 41) which gives uniform large-angle deflection plus high reliability.


8
Rodney L Clark: Optically addressed spatial light modulator and method. SY Technology, Birch Stewart Kolasch & Birch, November 25, 1997: US05691836 (44 worldwide citation)

An optically addressed spatial light modulator includes a reflective modulation element, a detector for detecting radiation, a micro-lens focusing a write beam on the detector and a read beam on the modulator element, and a circuit receiving a signal output from the detector generated in response to ...


9
Shaoher X Pan: High contrast spatial light modulator and method. Spatial Photonics, Fish & Richardson P C, January 23, 2007: US07167298 (31 worldwide citation)

A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate.


10
Hornbeck Larry J: Spatial light modulator and method.. Texas Instruments, September 20, 1989: EP0332953-A2 (26 worldwide citation)

An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes (40, 41) which gives uniform large-angle deflection plus high reliability.