1
Kazuo Iizuka: Reticle conveying device. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, March 12, 1991: US04999671 (28 worldwide citation)

A reticle conveying system includes a reticle keeping shelf for keeping therein a plurality of reticles; a first conveying portion for selecting and extracting a desired reticle out of the reticle keeping shelf and for conveying the extracted reticle to a predetermined position; and a second conveyi ...


2
Nakahara Kanefumi: Light-exposing device, light-exposing method, and conveying device. Nikon, June 19, 1998: JP1998-163094

PROBLEM TO BE SOLVED: To automatically convey a reticle to a reticle library of a light- exposing device. SOLUTION: A reticle case is conveyed from a reticle stocker to a light- exposing device by a reticle case unattended conveying robot moving in a clean room. The light-exposing device comprises r ...