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Phan Khoi A, Rangarajan Bharath, Singh Bhanwar, Subramanian Ramkumar: Refractive index system monitor and control for immersion lithography. Advanced Micro Devices, Phan Khoi A, Rangarajan Bharath, Singh Bhanwar, Subramanian Ramkumar, COLLOPY Daniel R, March 3, 2005: WO/2005/019935 (348 worldwide citation)

A system and/or method are disclosed for measuring (250) and/or controlling (260) refractive index (n) and/or lithographic constant (k) of an immersion medium (210) utilized in connection with immersion lithography. A known grating structure (602) is built upon a substrate (220). A refractive index ...


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Khoi A Phan, Bharath Rangarajan, Bhanwar Singh, Ramkumar Subramanian: Refractive index system monitor and control for immersion lithography. Advanced Micro Devices, Amin & Turocy, January 18, 2005: US06844206 (68 worldwide citation)

A system and/or method are disclosed for measuring and/or controlling refractive index (n) and/or lithographic constant (k) of an immersion medium utilized in connection with immersion lithography. A known grating structure is built upon a substrate. A refractive index monitoring component facilitat ...


3
Khoi A Phan, Bharath Rangarajan, Bhanwar Singh, Ramkumar Subramanian: Refractive index system monitor and control for immersion lithography. Advanced Micro Devices, Amin & Turocy, February 14, 2006: US06999254 (17 worldwide citation)

A system and/or method are disclosed for measuring and/or controlling refractive index (n) and/or lithographic constant (k) of an immersion medium utilized in connection with immersion lithography. A known grating structure is built upon a substrate. A refractive index monitoring component facilitat ...


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