1
Satoru Kobayashi, Soonam Park, Dmitry Lubomirsky, Hideo Sugai: Radial waveguide systems and methods for post-match control of microwaves. Applied Materials, Kilpatrick Townsend & Stockton, March 29, 2016: US09299537 (56 worldwide citation)

A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals i ...


2
Satoru Kobayashi, Soonam Park, Dmitry Lubomirsky: Radial waveguide systems and methods for post-match control of microwaves. Applied Materials, Kilpatrick Townsend & Stockton, March 29, 2016: US09299538 (55 worldwide citation)

A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals i ...


3
Satoru Kobayashi, Soonam Park, Dmitry Lubomirsky, Hideo Sugai: Radial waveguide systems and methods for post-match control of microwaves. Applied Materials, Kilpatrick Townsend & Stockton, February 7, 2017: US09564296 (33 worldwide citation)

A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals i ...


4
RADIAL WAVEGUIDE SYSTEMS AND METHODS FOR POST-MATCH CONTROL OF MICROWAVES. Applied Materials, September 24, 2015: US20150270105-A1

A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals i ...


5
RADIAL WAVEGUIDE SYSTEMS AND METHODS FOR POST-MATCH CONTROL OF MICROWAVES. Applied Materials, September 24, 2015: US20150270106-A1

A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals i ...


6
RADIAL WAVEGUIDE SYSTEMS AND METHODS FOR POST-MATCH CONTROL OF MICROWAVES. Applied Materials, June 30, 2016: US20160189933-A1

A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals i ...


7
RADIAL WAVEGUIDE SYSTEMS AND METHODS FOR POST-MATCH CONTROL OF MICROWAVES. Applied Materials, April 20, 2017: US20170110290-A1

A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals i ...


8
METHODS AND APPARATUS FOR DYNAMICAL CONTROL OF RADIAL UNIFORMITY IN MICROWAVE CHAMBERS. June 20, 2019: US20190189399-A1

Plasma is generated in a semiconductor process chamber by a plurality of microwave inputs with slow or fast rotation. Radial uniformity of the plasma is controlled by regulating the power ratio of a center-high mode and an edge-high mode of the plurality of microwave inputs into a microwave cavity. ...