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Chia Tai Chang, Chin Yi Tsai, Chiu Kuei Chen, Chen Chih Yu, Chien Chang Lai, Chin Tien Yang, Hui Pin Yang, Keng Shieng Chang, Yun Ru Huang: Probe holding structure and optical inspection device equipped with the same. MPI Corporation, Muncy Geissler Olds & Lowe P C, January 26, 2016: US09244018

A probe holding structure includes a substrate and a plurality of holding modules. The substrate has an opening and a plurality of grooves arranged around a periphery of the opening. The holding modules are connected with the grooves, respectively. Each holding modules includes a fixing member and a ...


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PROBE HOLDING STRUCTURE AND OPTICAL INSPECTION DEVICE EQUIPPED WITH THE SAME. January 16, 2014: US20140016123-A1

A probe holding structure includes a substrate and a plurality of holding modules. The substrate has an opening and a plurality of grooves arranged around a periphery of the opening. The holding modules are connected with the grooves, respectively. Each holding modules includes a fixing member and a ...