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Kenneth Smith, Michael Jolley, Victoria Van Syckel: Probe head having a membrane suspended probe. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, May 6, 2008: US07368927 (37 worldwide citation)

A probe head including an elastic membrane capable of exerting a restoring force when one of the surfaces of the elastic membrane is distorted. A conductive probe includes a beam having a first end and a second end, with a probe tip proximate the first end for contacting a device under test. A beam ...


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Kenneth Smith, Michael Jolley, Victoria Van Syckel: Probe head having a membrane suspended probe. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, April 7, 2009: US07514944 (7 worldwide citation)

A probe head including an elastic membrane capable of exerting a restoring force when one of the surfaces of the elastic membrane is distorted. A conductive probe includes a beam having a first end and a second end, with a probe tip proximate the first end for contacting a device under test. A beam ...


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Smith Kenneth, Jolley Michael, Van, Syckel Victoria: Probe head having a membrane suspended probe. Cascade Microtech, Smith Kenneth, Jolley Michael, Van, Syckel Victoria, RUSSELL Kevin L, February 16, 2006: WO/2006/017078

A probe head including an elastic membrane capable of exerting a restoring force when one of the surfaces of the elastic membrane is distorted. A conductive probe includes a beam having a first end and a second end, with a probe tip proximate the first end for contacting a device under test A beam c ...


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