1
Erik R Loopstra, Gerrit M Bonnema, Harmen K Van Der Schoot, Gerjan P Veldhuis, Yim Bun P Kwan: Positioning device having two object holders. ASM Lithography, Pillsbury Winthrop, July 17, 2001: US06262796 (335 worldwide citation)

A positioning device has first and second object holders that are guided over a guiding surface extending parallel to an X-direction and parallel to a Y-direction perpendicular to the X-direction and which are displaceable over the guiding surface from a first position into a second position by mean ...


2

3
Loopstra Erik Roelof, Bonnema Gerrit Maarten, Van Der, Schoot Harmen Klaas, Veldhuis Gerjan Peter, Kwan Yim Bun Patrick: Positioning device having two object holders. Koninklijke Philips Electronics, Asm Lithography, Loopstra Erik Roelof, Bonnema Gerrit Maarten, Van Der, Schoot Harmen Klaas, Veldhuis Gerjan Peter, Kwan Yim Bun Patrick, WOLFS Marc J M, September 17, 1998: WO/1998/040791 (1 worldwide citation)

A positioning device (3) suitable for use in a lithographic device with an exposure position and a characterization position has a displacement system (35) comprising a first displacement unit (39) and a second displacement unit (41) to which object holders (21, 23) can be coupled alternately. The f ...


4
Yim Bun Patrick Kwan, Gerrit Maarten Bonnema, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Gerjan Peter Veldhuis: Positioning device having two object holders. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, February 5, 2008: USRE040043

A positioning device has first and second object holders that are guided over a guiding surface extending parallel to an X-direction and parallel to a Y-direction perpendicular to the X-direction and which are displaceable over the guiding surface from a first position into a second position by mean ...


5
Loopstra Erik Roelof, Bonnema Gerrit Maarten, Van Der Schoot Harmen Klaas, Veldhuis Gerjan Peter, Kwan Yim Bun Patrick: Positioning device having two object holders. Asm Lithography, September 1, 2001: TW452546

The invention relates to a positioning device (3) having a first object holder (21) and a second object holder (23) which are guided over a guiding surface (33) extending parallel to an X-direction and parallel to a Y-direction perpendicular to the X-direction and which are displaceable over the gui ...


6