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Meijer Hendricus J M, Rozenveld Johannes Albert, Vermeer Adrianus J P M, Markvoort Jan Albert, Maaden Johan Van Der, Eijk Jan Van: Positioning device having two manipulators operating in parallel, and optical lithographic device provided with such a positioning device.. Koninkl Philips Electronics, Asm Lithography, February 3, 1993: EP0525872-A1 (10 worldwide citation)

A positioning device (59) having two transport arms (77,81) for alternately transferring plate-shaped objects from a storage position into an operational position. The transport arms are each displaceable by means of a separate manipulator (75,79), so that a quick exchange of the objects is possible ...


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Hendricus J M Meijer, Johannes A Rozenveld, Adrianus J Vermeer, Jan A Markvoort, Johan van der Maaden, Jan van Eijk: Positioning device having two manipulators operating in parallel, and optical lithographic device provided with such a positioning device. U S Philips Corporation, Steven R Biren, April 5, 1994: US05301013 (5 worldwide citation)

A positioning device has two transport arms for alternately transferring plate-shaped objects from a storage position into an operational position. The transport arms are each displaceable by means of a separate manipulator, so that a quick exchange of the objects is possible. The manipulators each ...