1
Terry R Turner, James D Spain, John R Swyers: Plasma monitoring and control method and system. Fourth State Technology, Baker & Botts L, November 19, 1996: US05576629 (92 worldwide citation)

A plasma monitoring and control method and system monitor and control plasma in an electronic device fabrication reactor by sensing the voltage of the radio frequency power that is directed into the plasma producing gas at the input to the plasma producing environment of the electronic device fabric ...


2
Terry Richard Turner, James Douglas Spain, John Rice Swyers: Plasma monitoring and control method and system. Advanced Energy, August 17, 1999: US05939886 (66 worldwide citation)

A plasma monitoring and control method and system monitor and control plasma in an electronic device fabrication reactor by sensing the voltage of the radio frequency power that is directed into the plasma producing gas at the input to the plasma producing environment of the electronic device fabric ...