1
Vincent Shea, Walter J Wojcik: Pellicle cover for projection printing system. International Business Machines Corporation, David M Bunnell, December 26, 1978: US04131363 (41 worldwide citation)

In a projection printing system the pattern mask, whose image is projected onto a light sensitive layer, is protected with a thin, 0.2-6 micron thick, transparent film or pellicle which is positioned an optically large distance of about 1-125 mm from the mask surface by a spacer member. Any dirt par ...


2
Dawn L Duly, Henry Windischmann, W D Buckley: Method of fabricating a pellicle cover for projection printing system. The Perkin Elmer Corporation, Edwin T Grimes, Thomas P Murphy, August 14, 1984: US04465759 (8 worldwide citation)

The invention is directed to a method of fabricating a pellicle cover assembly for use in a projection printing system for forming an image on a radiation sensitive wafer, the method comprising the steps of applying a gold film onto the surface of a wafer, applying a polymer film onto the gold film ...


3
Dawn L Duly, Henry Windischmann, W D Buckley: Method of fabricating a pellicle cover for projection printing system. The Perkin Elmer Corporation, Thomas P Murphy, Edwin T Grimes, F L Masselle, June 18, 1985: US04523974 (7 worldwide citation)

The invention is also directed to a method of fabricating a pellicle cover assembly for use in a projection printing system for forming an image on a radiation sensitive wafer, the method comprising the steps of applying a gold film onto the surface of a wafer, applying a polymer film onto the gold ...


4
Duly Dawn L, Windischmann Henry, Buckley W D: Method of fabricating a pellicle cover for projection printing system.. Perkin Elmer, September 26, 1984: EP0119310-A1

The invention is directed to a method of fabricating a pellicle cover assembly for use in a projection printing system for forming an image on a radiation sensitive wafer, the method comprising the steps of applying a gold film onto the surface of a wafer, applying a polymer film onto the gold film ...