1
David W Burns, Henry Guckel, James D Zook: Opto-electro-mechanical device or filter, process for making, and sensors made therefrom. Honeywell, Ian D Mackinnon, September 24, 1996: US05559358 (371 worldwide citation)

The present invention relates to microstructures fabricated from semiconductor material and having a flexible member which is excited into various modes of resonance and in which such resonance is read optically. By coupling the microstructure to a surface or material of interest, a drive means will ...


2
Guckel Henry, Zook James D, Burns David W: Opto-electro-mechanical device or filter, process for making, and sensors made therefrom. Honeywell, MCDOWALL Paul H, December 8, 1994: WO/1994/028452

This invention relates to devices and their applications which employ a resonant semiconductor member whose vibratory motion is coupled to the radiant energy cast onto a photovoltaic energy conversion device. It also relates to such devices whose vibratory behaviour is otherwise affected and which a ...


3
Guckel Henry, Zook James D, Burns David W: Opto-electro-mechanical device or filter, process for making, and sensors made therefrom. Honeywell, March 27, 1996: EP0702802-A1

This invention relates to devices and their applications which employ a resonant semiconductor member whose vibratory motion is coupled to the radiant energy cast onto a photovoltaic energy conversion device. It also relates to such devices whose vibratory behaviour is otherwise affected and which a ...



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