1
Frank T Hartley: Micromachined peristaltic pump. Price Gess & Ubell, January 6, 1998: US05705018 (208 worldwide citation)

A micromachined pump including a channel formed in a semiconductor substrate by conventional processes such as chemical etching. A number of insulating barriers are established in the substrate parallel to one another and transverse to the channel. The barriers separate a series of electrically cond ...


2
Hartley Frank T: Micromachined peristaltic pump. Hartley Frank T, June 18, 1997: EP0779436-A2 (161 worldwide citation)

A micromachined pump including a channel formed in a semiconductor substrate by conventional processes such as chemical etching. A number of insulating barriers are established in the substrate parallel to one another and transverse to the channel. The barriers separate a series of electrically cond ...



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