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Mark J Zdeblick, Thomas R Albrecht: Microfabricated microscope assembly. The Board of Trustees of the Leland Stanford Junior University, Flehr Hohbach Test Albritton & Herbert, May 14, 1991: US05015850 (69 worldwide citation)

A microfabricated microscope assembly including a piezoelectric bimorph cantilever arm mounted at one end to a first substrate. The free end of the canitlever arm has a tip mounted thereto for scanning a scanned surface mounted on a second substrate. The cantilever arm and the substrate are configur ...


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Zdeblick Mark J, Albrecht Thomas R: Microfabricated microscope assembly. The Board Of Trustees Of The Leland Stanford Junior University, TRECARTIN Richard F, December 27, 1990: WO/1990/015986

A microfabricated microscope assembly (100) including a piezoelectric bimorph cantilever arm (102) mounted at one end to a first substrate (106). The free end of the cantilever arm has a tip (104) mounted thereto for scanning a scanned surface (110) mounted on a second substrate (114). The cantileve ...