1
Marc A Unger, Hou Pu Chou, Todd A Thorsen, Axel Scherer, Stephen R Quake: Microfabricated elastomeric valve and pump systems. California Institute of Technology, Townsend & Townsend & Crew, June 25, 2002: US06408878 (417 worldwide citation)

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a se ...


2
Marc A Unger, Hou Pu Chou, Todd A Thorsen, Axel Scherer, Stephen R Quake, Jian Liu, Mark L Adams, Carl L Hansen: Microfabricated elastomeric valve and pump systems. California Institute of Technology, Townsend and Townsend and Crew, August 16, 2005: US06929030 (150 worldwide citation)

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a se ...


3
Marc A Unger, Hou Pu Chou, Todd A Thorsen, Axel Scherer, Stephen R Quake: Microfabricated elastomeric valve and pump systems. California Institute of Technology, Townsend and Townsend and Crew, December 5, 2006: US07144616 (149 worldwide citation)

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a se ...


4
Marc A Unger, Hou Pu Chou, Todd A Thorsen, Axel Scherer, Stephen R Quake, Markus M Enzelberger, Mark L Adams, Carl L Hansen: Microfabricated elastomeric valve and pump systems. California Institute of Technology, Townsend and Townsend and Crew, May 31, 2005: US06899137 (118 worldwide citation)

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a se ...


5
Marc Unger, Hou Pu Chou, Todd Thorsen, Axel Scherer, Stephen Quake, Markus Enzelberger, Mark Adams, Carl Hansen: Microfabricated elastomeric valve and pump systems. California Institute of Technology, Townsend and Townsend and Crew, May 15, 2007: US07216671 (86 worldwide citation)

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a se ...


6
Unger Marc A, Chou Hou Pu, Thorsen Todd A, Scherer Axel, Quake Stephen R: Microfabricated elastomeric valve and pump systems. California Inst Of Techn, January 3, 2001: EP1065378-A2 (57 worldwide citation)

A method of fabricating an elastomeric structure for a micropump or valve comprising: forming a first elastomeric layer on top of a first micromachined mold (10), the first micromachined mold (10) having a first raised protrusion (11) which forms a first recess (21) extending along a bottom surface ...


7
Marc A Unger, Hou Pu Chou, Todd A Thorsen, Axel Scherer, Stephen R Quake: Microfabricated elastomeric valve and pump systems. California Institute of Technology, Townsend and Townsend and Crew, May 9, 2006: US07040338 (41 worldwide citation)

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a se ...


8
Marc A Unger, Hou Pu Chou, Todd A Thorsen, Axel Scherer, Stephen R Quake: Microfabricated elastomeric valve and pump systems. California Institute of Technology, Townsend and Townsend and Crew, January 30, 2007: US07169314 (38 worldwide citation)

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a se ...


9
Marc A Unger, Hou Pu Chou, Todd A Thorsen, Axel Scherer, Stephen R Quake: Microfabricated elastomeric valve and pump systems. California Institute of Technology, Townsend and Townsend and Crew, October 13, 2009: US07601270 (30 worldwide citation)

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a se ...


10
Unger Marc A, Chou Hou Pu, Thorsen Todd A, Scherer Axel, Quake Stephen R, Liu Jian, Adams Mark L, Hansen Carl L: Microfabricated elastomeric valve and pump systems. California Inst Of Techn, September 24, 2003: EP1345551-A2 (17 worldwide citation)

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a se ...