1
Yu Chong Tai, John A Wright: Micro-electromechanical relays. California Institute of Technology, Fish & Richardson P C, July 25, 2000: US06094116 (90 worldwide citation)

A micro-electromechanical relay ("micro-relay") designed to both miniaturize and improve upon present day electromechanical relays. The micromachining fabrication process used to make the micro-relay is based upon technology originally used by integrated circuit (IC) manufacturers. In simplest terms ...


2
Tai Yu Chong, Wright John A: Micro-electromechanical relays. California Inst Of Techn, January 5, 2000: EP0968530-A1

A micro-electromechanical relay ("micro-relay") designed to both miniaturize and improve upon present day electromechanical relays. The micromachining fabrication process used to make the inventive micro-relay is based upon technology originally used by integrated circuit (IC) manufacturers. In simp ...


3
Tai Yu Chong, Wright John A: Micro-electromechanical relays. California Institute Of Technology, HARRIS Scott C, August 6, 1998: WO/1998/034269

A micro-electromechanical relay ('micro-relay') designed to both miniaturize and improve upon present day electromechanical relays. The micromachining fabrication process used to make the inventive micro-relay is based upon technology originally used by integrated circuit (IC) manufacturers. In simp ...


4
ELECTROMECHANICAL RELAY DEVICE. March 7, 2019: US20190074152-A1

A electromechanical relay device (100) comprising a source electrode (102), a beam (104) mounted on the source electrode at a first end and electrically coupled to the source electrode; a first drain electrode (112) located adjacent a second end of the beam, wherein a first contact (110) on the beam ...