1
Pekka J Soininen, Kai Erik Elers, Suvi Haukka: Method of growing electrical conductors by reducing metal oxide film with organic compound containing -OH, -CHO, or -COOH. ASM Microchemistry Oy, Knobbe Martens Olson & Bear, November 19, 2002: US06482740 (293 worldwide citation)

This invention relates to manufacturing of integrated circuits (ICs) and especially conductive layers suitable for use in an IC. According to the preferred method a metal oxide thin film is deposited on a substrate surface and reduced thereafter essentially into a metallic form with an organic reduc ...


2
Juhana Kostamo, Maarten Stokhof: Method of growing electrical conductors. ASM International, Knobbe Martens Olson & Bear, June 27, 2006: US07067407 (66 worldwide citation)

A method for forming a conductive thin film includes depositing a metal oxide thin film on a substrate by an atomic layer deposition (ALD) process. The method further includes at least partially reducing the metal oxide thin film by exposing the metal oxide thin film to a gaseous inorganic reducing ...


3
Pekka J Soininen, Kai Erik Elers, Suvi Haukka: Method of growing electrical conductors. ASM International, Knobbe Martens Olson & Bear, May 3, 2005: US06887795 (55 worldwide citation)

This invention relates to manufacturing of integrated circuits (ICs) and especially conductive layers suitable for use in an IC. According to the preferred method a metal oxide thin film is deposited on a substrate surface and reduced thereafter essentially into a metallic form with an organic reduc ...


4
Juhana Kostamo, Pekka J Soininen, Kai Erik Elers, Suvi Haukka: Method of growing electrical conductors. ASM International, Knobbe Martens Olson & Bear, February 24, 2009: US07494927 (37 worldwide citation)

A method for forming a conductive thin film includes depositing a metal oxide thin film on a substrate by an atomic layer deposition (ALD) process. The method further includes at least partially reducing the metal oxide thin film by exposing the metal oxide thin film to a reducing agent, thereby for ...


5
Juhana Kostamo, Pekka J Soininen, Kai Erik Elers, Suvi Haukka: Method of growing electrical conductors. ASM International, Knobbe Martens Olson & Bear, June 7, 2011: US07955979 (15 worldwide citation)

A method for forming a conductive thin film includes depositing a metal oxide thin film on a substrate by an atomic layer deposition (ALD) process. The method further includes at least partially reducing the metal oxide thin film by exposing the metal oxide thin film to a reducing agent, thereby for ...


6
Juhana Kostamo, Pekka J Soininen, Kai Erik Elers, Suvi Haukka: Method of growing electrical conductors. ASM International, Knobbe Martens Olson & Bear, September 17, 2013: US08536058 (13 worldwide citation)

A method for forming a conductive thin film includes depositing a metal oxide thin film on a substrate by an atomic layer deposition (ALD) process. The method further includes at least partially reducing the metal oxide thin film by exposing the metal oxide thin film to a reducing agent, thereby for ...


7
Pekka J Soininen, Kai Erik Elers, Suvi Haukka: Method of growing electrical conductors. Knobbe Martens Olson & Bear, January 10, 2002: US20020004293-A1 (5 worldwide citation)

This invention relates to manufacturing of integrated circuits (ICs) and especially conductive layers suitable for use in an IC. According to the preferred method a metal oxide thin film is deposited on a substrate surface and reduced thereafter essentially into a metallic form with an organic reduc ...


8
Pekka J Soininen, Kai Erik Elers, Suvi Haukka: Method of growing electrical conductors. Knobbe Martens Olson & Bear, May 22, 2003: US20030096468-A1 (1 worldwide citation)

This invention relates to manufacturing of integrated circuits (ICs) and especially conductive layers suitable for use in an IC. According to the preferred method a metal oxide thin film is deposited on a substrate surface and reduced thereafter essentially into a metallic form with an organic reduc ...


9
Juhana Kostamo, Pekka J Soininen, Kai Erik Elers, Suvi Haukka: Method of growing electrical conductors. Knobbe Martens Olson & Bear, January 8, 2004: US20040005753-A1

A method for forming a conductive thin film includes depositing a metal oxide thin film on a substrate by an atomic layer deposition (ALD) process. The method further includes at least partially reducing the metal oxide thin film by exposing the metal oxide thin film to a reducing agent, thereby for ...


10
Juhana Kostamo, Pekka J Soininen, Kai Erik Elers, Suvi Haukka: Method of growing electrical conductors. ASM International, Knobbe Martens Olson & Bear, June 19, 2008: US20080146042-A1

A method for forming a conductive thin film includes depositing a metal oxide thin film on a substrate by an atomic layer deposition (ALD) process. The method further includes at least partially reducing the metal oxide thin film by exposing the metal oxide thin film to a reducing agent, thereby for ...