1
Makoto Aritsuka, Naruyuki Iwanaga: Method for purifying nitrogen trifluoride gas. Mitsui Toatsu Chemicals Incorporated, Fisher Christen & Sabol, June 12, 1990: US04933158 (68 worldwide citation)

There is here disclosed a method for removing nitrous oxide (N.sub.2 O), carbon dioxide (CO.sub.2) and dinitrogen difluoride (N.sub.2 F.sub.2) from a nitrogen trifluoride gas. The present invention is directed to a method for purifying a nitrogen trifluoride gas which comprises the steps of thermall ...


2
Isao Harada, Hisashi Hokonohara, Toshiaki Yamaguchi: Method for purifying nitrogen trifluoride gas. Mitsui Toatsu Chemicals, Fisher Christen & Sabol, February 2, 1993: US05183647 (9 worldwide citation)

NF.sub.3 gas containing N.sub.2 F.sub.2 as an impurity is purified by heating said NF.sub.3 gas at specified temperatures in a vessel the inner wall of which is coated with a strong and passive film of nickel flouride. According to this method, the rate of NF.sub.3 loss is low and the rate of removi ...


3
Aritsuka Makoto, Iwanaga Naruyuki: Method for purifying nitrogen trifluoride gas.. Mitsui Toatsu Chemicals, May 2, 1990: EP0366078-A2 (6 worldwide citation)

There is here disclosed a method for removing nitrous oxide (N2O), carbon dioxide (CO2) and dinitrogen difluoride (N2F2) from a nitrogen trifluoride gas. The present invention is directed to a method for purifying a nitrogen trifluoride gas which comprises the steps of thermally treating, at a tempe ...


4
Aritsuka Makoto, Iwanaga Naruyuki: Methode de purification du trifluorure dazote, Method for purifying nitrogen trifluoride gas. Mitsui Chemicals Incorporated, BORDEN LADNER GERVAIS, June 23, 1998: CA2001304

A method is provided herein for purifying a nitrogentrifluoride gas. The method includes the steps ofthermally treating a natural zeolite, e.g., analcime,clipnoptilolite, mordenite, ferrierit, phillipsite, chabazite,erionite and laumontite, at a temperature of 250� to 700�C. A packed bed is then for ...


5
Aritsuka Makoto, Iwanaga Tokuyuki, Nishitsuji Toshihiko: Method for purifying nitrogen trifluoride gas. Mitsui Toatsu Chem, June 23, 1992: JP1992-175211

PURPOSE: To stably adsorb and remove impurities and efficiently purify NF3 gas by removing CO2 gas from the NF3 Gas and then passing the resultant gas through a packed layer of natural zeolite presubjected to specific treatment at a prescribed temperature. CONSTITUTION: Natural zeolite used as an ad ...


6
Jung U Sik, Park Yong Cheol: Method for purifying nitrogen trifluoride gas using zsm-5 zeolite. Hyosung Corporation, July 7, 2004: KR1020020087553

PURPOSE: Provided is a method for purifying nitrogen trifluoride gas using a ZSM-5 zeolite which removes carbon tetrafluoride from the nitrogen trifluoride gas. CONSTITUTION: The method comprises steps of (a) after de-silicating ZSM-5 zeolite, impregnating it with a column 1B metal; (b) filling the ...