1
Masahiro Yamazaki, Shigeru Iizuka, Shigemitsu Kamiya, Yoshiro Oka, Katsuhiro Fujino: Method and apparatus for feeding drug liquid from hermetic returnable can. Nippon Zeon, Fujitsu, Weingarten Schurgin Gagnebin & Hayes, June 30, 1987: US04676404 (50 worldwide citation)

An apparatus for feeding a variety of doping liquid used in doping-liquid treatment processes for electronic materials such as semiconductors and precision machinery components, and a feeding monitor apparatus. More specifically, it relates to an apparatus for stably feeding the doping liquid while ...


2
Yamazaki Masahiro, Iizuka Shigeru, Kamiya Shigemitsu, Oka Yoshiro, Fujino Katsuhiro: Method and apparatus for feeding drug liquid from hermetic returnable can.. Nippon Zeon, Fujitsu, April 24, 1985: EP0138718-A2 (7 worldwide citation)

The present invention provides a method and an apparatus by which a drug liquid can be fed, monitoring its volume without bringing the liquid into contact with the outside air, while keeping up its clean state; when the volume of the drug liquid decreases below a predetermined level, warning will be ...