1
Yu Chong Tai, Amish Desai, Terry Lee, Mike Davis: MEMS electrospray nozzle for mass spectroscopy. California Institute of Technology, Fish & Richardson P C, November 30, 1999: US05994696 (81 worldwide citation)

An apparatus for MEMS electrospray nozzle for mass spectroscopy formed with top and bottom of SiN, and a between layer of material. The material between the top and bottom forms a filter and also reduces the amount of dead space in the nozzle.


2
Tai Yu Chong, Desai Amish, Lee Terry, Davis Mike: Mems electrospray nozzle for mass spectroscopy. California Inst Of Techn, November 24, 1999: EP0958593-A1

A MEMS electrospray nozzle (320) for mass spectroscopy is disclosed. The nozzle has: a channel field (380) having an inner diameter between 0.3-3 mu m; a nozzle tip (390); and a filter structure (370) positioned on the channel field. A method of fabricating the nozzle is also disclosed.


3
Tai Yu Chong, Desai Amish, Lee Terry, Davis Mike: Mems electrospray nozzle for mass spectroscopy. California Institute Of Technology, HARRIS Scott C, August 13, 1998: WO/1998/035376

A MEMS electrospray nozzle (320) for mass spectroscopy is disclosed. The nozzle has: a channel field (380) having an inner diameter between 0.3-3 $g(m)m; a nozzle tip (390); and a filter structure (370) positioned on the channel field. A method of fabricating the nozzle is also disclosed.