1
Erwin Meinders
Wilhelmus Johannes Maria De Laat, Cheng Qun Gui, Peter Theodorus Maria Giesen, Paulus Wilhelmus Leonardus Van Dijk, Erwin Rinaldo Meinders, Maria Peter: Lithographic method and carrier substrate. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, October 4, 2011: US08029973

A carrier substrate is provided with a layer of PDMS and curing agent on one side of the carrier substrate. The PDMS and curing agent can be arranged to receive and adhere to a lithographic substrate. The carrier substrate can be dimensioned such that the combined carrier substrate and lithographic ...


2
Erwin Meinders
De Laat Wilhelmus Johannes Maria, Gui Cheng Qun, Giesen Peter Theodorus Maria, Leonardus Van Dijk Paulus Wilhelmus, Meinders Erwin Rinaldo, Peter Maria: Lithographic method and carrier substrate. Asml Netherlands, July 2, 2009: JP2009-147327

PROBLEM TO BE SOLVED: To provide a new lithographic carrier substrate.SOLUTION: A layer of PDMS and curing agent is provided on one side of the carrier substrate. The PDMS and curing agent receive and adhere to a lithographic substrate. Such dimensions can be given to the carrier substrate that the ...


3
Erwin Meinders
Wilhelmus Johannes Maria DE LAAT, Cheng Qun GUI, Peter Theodorus Maria GIESEN, Paulus Wilhelmus Leonardus VAN DIJK, Erwin Rinaldo MEINDERS, Maria PETER: Lithographic method and carrier substrate. Asml Netherlands, Pillsbury Winthrop Shaw Pittman, July 2, 2009: US20090170025-A1

A carrier substrate is provided with a layer of PDMS and curing agent on one side of the carrier substrate. The PDMS and curing agent can be arranged to receive and adhere to a lithographic substrate. The carrier substrate can be dimensioned such that the combined carrier substrate and lithographic ...