1
Yasufumi Nishii, Hiroyuki Nagasaka, Takeshi Okuyama: Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method. Nikon Corporation, Oliff & Berridge, March 13, 2012: US08134685 (28 worldwide citation)

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system comprises: a plate that has a first surface and a second surface on the side opposite the first surface; and a liquid recovery part, at least part of which opposes the second surface with a first gap inte ...


2
Hiroyuki Nagasaka: Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method. Nikon Corporation, Oliff & Berridge, August 23, 2011: US08004651 (28 worldwide citation)

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system is provided with a first opening; a gap portion that is provided so that a liquid on an object that opposes the first opening can flow into the gap portion through the first opening; a liquid recovery par ...


3
Yasufumi Nishii, Hiroyuki Nagasaka, Takeshi Okuyama: Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method. Nikon Corporation, Oliff, April 21, 2015: US09013675 (22 worldwide citation)

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system comprises: a plate that has a first surface and a second surface on the side opposite the first surface; and a liquid recovery part, at least part of which opposes the second surface with a first gap inte ...


4
Yasufumi Nishii, Hiroyuki Nagasaka, Takeshi Okuyama: Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method. Nikon Corporation, Oliff & Berridge, September 25, 2008: US20080233512-A1

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system comprises: a plate that has a first surface and a second surface on the side opposite the first surface; and a liquid recovery part, at least part of which opposes the second surface with a first gap inte ...


5
Hiroyuki Nagasaka: Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method. Nikon Corporation, Oliff & Berridge, July 24, 2008: US20080174748-A1

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system is provided with: a first opening; a gap portion that is provided so that a liquid on an object that opposes the first opening can flow into the gap portion through the first opening; a liquid recovery pa ...


6
Yasufumi NISHII, Hiroyuki NAGASAKA, Takeshi OKUYAMA: Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method. Nikon Corporation, May 31, 2012: US20120133912-A1

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system comprises: a plate that has a first surface and a second surface on the side opposite the first surface; and a liquid recovery part, at least part of which opposes the second surface with a first gap inte ...


7
Nagasaka Hiroyuki: Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method. Nikon Corporation, Nagasaka Hiroyuki, SHIGA Masatake, July 31, 2008: WO/2008/091014

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system is provided with: a first opening (33); a gap portion (15) that is provided so that a liquid on an object that opposes the first opening can flow into the gap portion through the first opening; a liquid r ...


8

9
Nagasaka Hiroyuki: Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method. Nippon Kogaku, Li Hui, November 25, 2009: CN200880002821

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system is provided with: a first opening; a gap portion that is provided so that a liquid on an object that opposes the first opening can flow into the gap portion through the first opening; a liquid recovery pa ...


10
Hiroyuki Nagasaka: Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method. Nikon Corporation, January 19, 2012: US20120013860-A1

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system is provided with: a first opening; a gap portion that is provided so that a liquid on an object that opposes the first opening can flow into the gap portion through the first opening; a liquid recovery pa ...