1
Richard L Anderson: Intelligent mass flow controller. Sematech, William W Kidd, November 5, 1991: US05062446 (114 worldwide citation)

An intelligent mass flow controller for controlling the mass flow of gas to a semiconductor processing chamber. A sensing circuit measures a difference in temperature across a sensing tube and translates this difference to adjust a valve for controlling the mass flow. A microcontroller which include ...


2
Anderson Richard L: Intelligent mass flow controller. Sematech, sBAHLER David D, July 23, 1992: WO/1992/012474

An intelligent mass flow controller for controlling the mass flow of gas to a semiconductor processing chamber. A sensing circuit measures a difference in temperature across a sensing tube and translates this difference to adjust a valve for controlling the mass flow. A microcontroller which include ...


3
Anderson Richard L: Intelligent mass flow controller.. Sematech, October 27, 1993: EP0566574-A1

An intelligent mass flow controller for controlling the mass flow of gas to a semiconductor processing chamber. A sensing circuit measures a difference in temperature across a sensing tube and translates this difference to adjust a valve for controlling the mass flow. A microcontroller which include ...