1
Akiyoshi Suzuki, Miyoko Noguchi: Imaging method for manufacture of microdevices. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, April 19, 1994: US05305054 (66 worldwide citation)

An imaging method for imaging a fine pattern having linear features extending along orthogonal first and second directions is disclosed, which method is characterized by: providing a light source having decreased intensity portions at a center thereof and on first and second axes defined to intersec ...


2
Suzuki Akiyoshi Kosugi Jigyosh, Noguchi Miyoko Kosugi Jigyosho: Imaging method for manufacture of microdevices.. Canon, August 26, 1992: EP0500393-A2 (19 worldwide citation)

An imaging method for imaging a fine pattern having linear features extending along orthogonal first and second directions, is disclosed which method is characterized by: providing a light source having decreased intensity portions at a center thereof and on first and second axes defined to intersec ...


3
Akiyoshi Suzuki, Miyoko Noguchi: Imaging method for manufacture of microdevices. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, July 4, 2000: US06084655 (11 worldwide citation)

An imaging method for imaging a fine pattern having linear features extending along orthogonal first and second directions is disclosed, which method is characterized by: providing a light source having decreased intensity portions at a center thereof and on first and second axes defined to intersec ...


4
Akiyoshi Suzuki, Miyoko Noguchi: Imaging method for manufacture of microdevices. Fitzpatrick Cella Harper & Scinto, August 23, 2001: US20010015797-A1 (2 worldwide citation)

An imaging method for imaging a fine pattern having linear features extending along orthogonal first and second directions, is disclosed which method is characterized by: providing a light source having decreased intensity portions at a center thereof and on first and second axes defined to intersec ...


5
Suzuki Akiyoshi, Noguchi Miyoko: Imaging method for manufacture of microdevices. Canon, July 25, 2001: EP1118909-A1

An imaging method for imaging a fine pattern having linear features extending along orthogonal first and second directions, is disclosed which method is characterized by: providing a light source having decreased intensity portions at a center thereof and on first and second axes defined to intersec ...


6
Suzuki Akiyoshi, Noguchi Miyoko: Methode dimagerie pour la fabrication de microdispositifs, Imaging method for manufacture of microdevices. Canon Kabushiki Kaisha, RIDOUT & MAYBEE, February 3, 1998: CA2061499

An imaging method for imaging a fine patternhaving linear features extending along orthogonalfirst and second directions, is disclosed which methodis characterized by: providing a light source havingdecreased intensity portions at a center thereof andon first and second axes defined to intersect wit ...


7
Suzuki Akiyoshi, Noguchi Miyoko: Methode de formation dimages pour la fabrication de microappareils, Imaging method for manufacture of microdevices. Canon Kabushiki Kaisha, Canon Kabushiki Kaisha, RIDOUT & MAYBEE, April 15, 2003: CA2216296

An imaging method for imaging a fine pattern having linear features extending along orthogonal first and second directions, is disclosed which method is characterized by: providing a light source having decreased intensity portions at a center thereof and on first and second axes defined to intersec ...


8

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Akiyoshi Suzuki, Miyoko Kawashima: Imaging method for manufacture of microdevices. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, April 29, 2004: US20040080736-A1

An imaging method for imaging a fine pattern having linear features extending along orthogonal first and second directions, is disclosed which method is characterized by: providing a light source having decreased intensity portions at a center thereof and on first and second axes defined to intersec ...