1
Takahisa Shiozawa, Masato Muraki, Hiroyuki Ishii, Shigeru Hayata: Illumination device for projection exposure apparatus. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, September 6, 1994: US05345292 (84 worldwide citation)

An illumination device, includes a secondary light source forming system having a deflecting member with a conical light deflecting surface for transforming received light into substantially ring-like light, the secondary light source forming system forming a ring-like secondary light source by usin ...


2
Shiozawa Takahisa, Muraki Masato, Ishii Hiroyuki, Hayata Shigeru: Illumination device for projection exposure apparatus.. Canon, October 6, 1993: EP0564264-A1 (58 worldwide citation)

An illumination device (1-14), includes a secondary light source forming system (101) having a deflecting member (6) with a conical light deflecting surface for transforming received light into substantially ring-like light, the secondary light source forming system forming a ring-like secondary lig ...