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Herschel M Marchman, Steven B Herschbein, Chad Rue, Michael Renner, Narender Rana: High-resolution optical channel for non-destructive navigation and processing of integrated circuits. International Business Machines Corporation, Todd M C Li, April 1, 2008: US07351966 (8 worldwide citation)

An optical-fiber based light channel system is included in an ion/electron beam tool for imaging and/or processing integrated circuits. The optical channel system includes an image collection portion, an optical fiber image transmission portion and a detector portion. The image collection portion in ...


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Herschel M Marchman, Steven B Herschbein, Chad Rue, Michael Renner, Narender Rana: High-resolution optical channel for non-destructive navigation and processing of integrated circuits. International Business Machines Corporation, International Business Machines Corporation, Dept 18g, March 20, 2008: US20080067369-A1

An optical-fiber based light channel system is included in an ion/electron beam tool for imaging and/or processing integrated circuits. The optical channel system includes an image collection portion, an optical fiber image transmission portion and a detector portion. The image collection portion in ...


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