1
George Chizinsky: Heated plate rapid thermal processor. Don Halgren, October 12, 1993: US05252807 (171 worldwide citation)

A rapid thermal processor for heat treating and cooling semiconductor material in an elongated process chamber having a base, side and top walls which enclose a heater plate assembly through which thin pins longitudinally move to carry workpieces vertically to and from the heater assembly. A cooling ...


2
George Chizinsky: Heated plate rapid thermal processor. Donald N Halgren, October 29, 1991: US05060354 (58 worldwide citation)

A rapid thermal processor for heat treating and cooling semiconductor material is an elongated process chamber having a base, side and top walls which enclose a heater plate assembly through which thin pins longitudinally move to carry workpieces vertically to and from the heater assembly. A cooling ...



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