81
Donald W Heidt, Steve Thompson, Worm Lund, Raymon F Thompson, Larry M Beasley: Vertical thermal processor for semiconductor wafers. Semitherm, Wells St John & Roberts, March 19, 1991: US05000682 (30 worldwide citation)

Semiconductor wafers within a supporting vertical wafer tower are positioned within a vertical process chamber through a lower gate valve fixed to a supporting framework. The gate valve is sealed to a similar gate valve at the upper end of a movable load lock on the framework, within which the wafer ...


82
Nobuyoshi Deguchi: Exposure apparatus, coating/developing apparatus, method of transferring a substrate, method of producing a device, semiconductor production factory, and method of maintaining an exposure apparatus. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, October 28, 2003: US06638672 (30 worldwide citation)

A photolithographic apparatus in which a light source exposes a substrate for patterning includes an enclosure having a controllable internal ambient for transferring the substrate in and out of the apparatus, a gate valve through which the substrate is transferred into or out of the enclosure, and ...


83
Earl P Shapland, Patrick D King: Full throttle valve and method of tube and gate change. USS Engineers and Consultants, John F Carney, November 15, 1983: US04415103 (29 worldwide citation)

A sliding gate valve of the type in which refractory gates are sequentially disposed in operative position beneath the pour opening from a teeming vessel, such as a tundish, is effective to controllably throttle the metal flow stream from the vessel. Separate drives are employed for disposing the ga ...


84
Sam J Jacobsen, Jody W Bigalke: Ice dispenser and display. Leer Manufacturing Partnership, Lathrop & Clark, December 7, 1993: US05267672 (29 worldwide citation)

A rotatable auger is disposed within an ice chest to direct ice through an opening into a tubular conduit through which runs a flexible looped cable. Plastic paddles are fixed to the cable at spaced intervals and engage with ice received within the conduit and advance the ice through the conduit to ...


85
Curtis W Clarkson, Larry F Koll: Gate valve. The Clarkson Company, Nies Webner Kurz & Bergert, August 25, 1987: US04688597 (29 worldwide citation)

A packingless gate valve is disclosed which includes a housing having opposed similar housing halves with resilient sleeve units which compressibly engage each other in the valve open condition and engage opposite sides of the gate in the valve closed condition. Each sleeve unit has a flange on the ...


86
Masaharu Nakagawa, Hiroshi Minamoto, Manabu Yabe, Yuuzou Hayashi, Norikimi Irie: Gate valve. Irie Koken, Sughrue Mion PLLC, May 13, 2003: US06561484 (29 worldwide citation)

A gate valve according to the present invention including a first valve plate having a valve opening, a second valve plate connected to the first valve plate via first bellows, and an actuator provided between the first valve plate and the second valve plate, wherein the first valve plate is moved b ...


87
Larry Webster Blake: Gate valve. American Hospital Supply Corporation, Tilton Fallon Lungmus & Chestnut, May 16, 1978: US04089506 (28 worldwide citation)

A gate valve for use with a catheter including an elongated valve body having a transversely extending slide chamber and a slide member slidably supported in the slide chamber for transverse sliding movement between first and second positions. The slide chamber is defined in part by a pair of longit ...


88
Spiros G Raftis, George W Merritt: Inversion-resistant, readily-openable tide gate valve. Red Valve Co, Kirschstein Kirschstein Ottinger & Israel, August 26, 1986: US04607663 (28 worldwide citation)

A tide gate valve has staggered pads embedded therein to provide sufficient strength to resist sagging and inversion, and to provide sufficient flexibility to promote an easy opening of the valve.


89
Yasutsugu Usami: Process and apparatus for transferring an object and for processing semiconductor wafers. Hitachi, Evenson McKeown Edwards & Lenahan, December 26, 1995: US05478195 (27 worldwide citation)

Apparatus for processing semiconductor wafers includes a load lock chamber with a first gate valve and a second gate valve so as to load and unload cassettes through the first gate valve, and to convey the wafers from the load lock chamber to a plurality of processing chambers through respective sec ...


90
Jurgen Balz: Sliding gate fluid control valve. Schubert & Salzer, Dority & Manning, December 25, 1984: US04489756 (27 worldwide citation)

A sliding gate valve includes a valve body (1) and a valve plate (5) which can slide transversely to the direction (108) of flow of the medium and exhibits narrow slot passages (50, 51) running transversely to the direction of the stroke, and which cooperates with a counterpart (4). The counterpart ...