21
Shunpei Yamazaki, Hongyong Zhang, Takashi Inushima, Takeshi Fukada: Method of manufacturing gate insulated field effect transistors. Semiconductor Energy Laboratory, Eric J Robinson, Nixon Peabody, July 17, 2001: US06261877 (52 worldwide citation)

A method of manufacturing thin film field effect transistors is described. The channel region of the transistors is formed by depositing an amorphous semiconductor film in a first sputtering apparatus followed by thermal treatment for converting the amorphous phase to a polycrystalline phase. The ga ...


22
Elwood K Pierce Jr: Pressure balanced gate valve having selective actuator systems. Petroleum Designers, James L Jackson, October 28, 1980: US04230299 (52 worldwide citation)

A pressure balanced gate valve mechanism wherein a closed loop fluid interchange system interconnects the valve actuator stem area of the valve mechanism with the pressure balancing stem area and functions to accomodate volumetric changes to prevent the development of a hydraulic lock that might oth ...


23
Rand William A, Kaufman Jerome: Visual pulmonary meter. January 18, 1972: US3635214 (52 worldwide citation)

A pocket-sized pulmonary meter which includes a hollow cylindrical chamber for slidably receiving a piston. A breathing tube assembly communicating with one end of the cylindrical chamber forms a flow passageway terminating with a mouthpiece through which a patient can exhale into the cylindrical ch ...


24
Paul R Orum, Larry A Vyvial: Manual override for hydraulic gate valve actuators. ACF Industries Incorporated, Eugene N Riddle, July 22, 1980: US04213480 (51 worldwide citation)

A double acting manual override mechanism for the hydraulic actuator of a subsea gate valve, and a visual indicator device for indicating the gate position. The gate is normally held open by hydraulic pressure and is moved by a spring to a fail closed position in the event of a malfunction. The over ...


25
Hongyong Zhang, Naoto Kusumoto: Method for annealing a semiconductor. Semiconductor Energy Laboratory, Gerald J Ferguson Jr, Eric J Robinson, Sixbey Friedman Leedom & Ferguson PC, January 19, 1999: US05861337 (50 worldwide citation)

A method for manufacturing a semiconductor device including preparing a multi-chamber system having at least first and second chambers, the first chamber for forming a film and the second chamber for processing an object with a laser light; processing a substrate in one of the first and second chamb ...


26
Masasi Saito, Teruo Iwata, Nobuo Ishii, Towl Ikeda, Hiroaki Saeki: Reduced pressure processing system and reduced pressure processing method. Tokyo Electron, Oblon Spivak McClelland Maier & Neustadt, May 24, 1994: US05314541 (49 worldwide citation)

A reduced pressure processing system includes a load lock chamber having an opening communicating with a process atmosphere in which a wafer is processed and/or the outer air atmosphere, a gate valve which is arranged at the opening to close/open the chamber with respect to the process atmosphere an ...


27
Douglas A Wood: Flow control systems. Technicon Isca, Trexler Bushnell & Wolters, October 19, 1982: US04354622 (47 worldwide citation)

Apparatus for controlling the rate of flow of a powdered solid material such as flour, comprising a load cell supporting an inclined plate onto which the flour particles impinge after falling through an inclined gate valve. The output of the load cell is fed to a control circuit including a direct p ...


28
Hans Jorg Sidler: Parallel-slide gate valve. Sistag, Martin A Farber, August 27, 1996: US05549278 (47 worldwide citation)

A parallel-slide gate valve with a sealing liner in two parts, comprises a semicircular lower housing part which can also be used as a mounting segment (30), and an upper housing part (31). The sealing liner (5) is also in two parts, wherein a transverse seal (20) which is subsequently compressible ...


29
Kenji Waragai, Tsuneo Ishigaki: Gate valve. SMC Kabushiki Kaisha, Paul A Guss, October 9, 2001: US06299133 (47 worldwide citation)

A gate valve comprises a valve rod for making displacement in accordance with a driving action of a cylinder mechanism; a guide shaft for guiding the valve rod; a valve disk for opening/closing a passage in accordance with a displacement action of the valve rod; a rack connected to the valve rod, fo ...


30
Jack A Dimock: Wafer processing machine. Sputtered Films, Harry E Aine, June 18, 1985: US04523985 (45 worldwide citation)

A sputter coating machine includes a rectilinearly translatable load-lock door closing off one end of an evacuable chamber. Wafers to be coated are loaded and unloaded by an elevator blade onto a chuck carried from the inside surface of the door. A clamping ring clamps the wafer to the chuck and adv ...



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