1
Michel Riepen, Nicolaas Rudolf Kemper, Johannes Catharinus Hubertus Mulkens, Rogier Hendrikus Magdalena Cortie, Ralph Joseph Meijers, Fabrizio Evangelista: Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, December 24, 2013: US08614784 (8 worldwide citation)

A fluid handling structure is provided for a lithographic apparatus having at a boundary between a space containing immersion fluid and a region external to the fluid handling structure, a plurality of openings arranged in a first line, a first gas knife device having an aperture in a second line, o ...


2
Rogier Hendrikus Magdalena Cortie, Paulus Martinus Maria Liebregts, Michel Riepen, Fabrizio Evangelista: Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply. ASML NETHERLANDS, Pillsbury Winthrop Shaw Pittman, February 9, 2016: US09256136

A fluid handling structure for a lithographic apparatus is disclosed, the fluid handling structure successively has, at a boundary from a space configured to contain immersion fluid to a region external to the fluid handling structure: an elongate opening or a plurality of openings arranged in a fir ...