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Tomoko Ohtsuki: Exposure device with laser device. Nikon Corporation, Oliff & Berridge, September 20, 2005: US06947123 (23 worldwide citation)

An exposure apparatus has a light source comprising a laser device that is small and easy to maintain. The laser device comprises a laser oscillator for generating a single-wavelength laser beam (LB3) within a wavelength range including infrared and visible regions; an optical amplifier (18) for amp ...


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Ohtsuki Tomoko: Exposure device with laser device. Nikon Corporation, Ohtsuki Tomoko, OMORI Satoshi, March 22, 2001: WO/2001/020398

An exposure device has a laser device that is small, easy to maintain, and capable of producing an output that is unlikely to be affected by optical surges occurring in the beginning of operation. A single-wavelength laser oscillator (11) supplies a laser beam (LB1) to a fiber optic amplifier (13) t ...


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Ohtsuki Tomoko: Exposure device with laser device. Nikon Corporation, Ohtsuki Tomoko, OMORI Satoshi, March 22, 2001: WO/2001/020651

An exposure device has a light source comprising a laser device that is small and easy to maintain. The laser device comprises a laser oscillator for generating a single-wavelength laser beam (LB3) within a wavelength range including infrared and visible regions; an optical amplifier (18) for amplif ...