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Christophe Pierrat, Youping Zhang: Dissection of printed edges from a fabrication layout for correcting proximity effects. Synopsys, Beyer Hoffman & Harms, Jeanette S Harms, July 12, 2005: US06918104 (189 worldwide citation)

Techniques for fabricating a device include forming a fabrication layout, such as a mask layout, for a physical design layer, such as a design for an integrated circuit, and identifying evaluation points on an edge of a polygon corresponding to the design layer for correcting proximity effects. Tech ...


2
Christophe Pierrat, Youping Zhang: Dissection of printed edges from a fabrication layout for correcting proximity effects. Numerical Technologies, Jeanette S Harms, Bever Hoffman & Harms, September 23, 2003: US06625801 (46 worldwide citation)

Techniques for fabricating a device include forming a fabrication layout, such as a mask layout, for a physical design layer, such as a design for an integrated circuit, and identifying evaluation points on an edge of a polygon corresponding to the design layer for correcting proximity effects. Tech ...


3
Christophe Pierrat, Youping Zhang: Dissection of printed edges from a fabrication layout for correcting proximity effects. Numerical Technologies, Numerical, C O Bever Hoffman & Harms, June 12, 2003: US20030110460-A1

Techniques for fabricating a device include forming a fabrication layout, such as a mask layout, for a physical design layer, such as a design for an integrated circuit, and identifying evaluation points on an edge of a polygon corresponding to the design layer for correcting proximity effects. Tech ...