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Larry J Hornbeck: Deformable mirror light modulator. Texas Instruments Incorporated, Robert Groover, Melvin Sharp, James T Comfort, April 10, 1984: US04441791 (623 worldwide citation)

A light modulator comprising a light-reflective metallized membrane defining a deformable mirror disposed over a semiconductor substrate of one conductivity type in which a matrix array of field effect address transistors are formed, the metallized membrane cooperating with a matrix of floating meta ...


2
Hornbeck Larry J: Deformable mirror light modulator.. Texas Instruments, March 10, 1982: EP0046873-A1 (9 worldwide citation)

A light modulator comprising a light-reflective metallized membrane (26, 25, 30, 31) defining a deformable mirror disposed over a semiconductor substrate (10) of one conductivity type in which a matrix array of field effect address transistors (13, 14) are formed, the metallized membrane (26, 25, 30 ...