1
Warren K Harwood, Martin J Koxxy, Paul A Tervo: Wafer probe station with integrated environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, November 30, 1993: US05266889 (119 worldwide citation)

A wafer probe station is equipped with a compact, integrated controlled-environment enclosure providing EMI shielding, substantially hermetic sealing for a dry purge gas for low-temperature testing, and a dark environment. The sealing isolation of the wafer chuck and test probe provided by the enclo ...


2
Harwood Warren K, Koxxy Martin J, Tervo Paul A: Wafer probe station with integrated environment control enclosure.. Cascade Microtech, December 8, 1993: EP0573183-A1 (49 worldwide citation)

A wafer probe station is equipped with a compact, integrated controlled-environment enclosure (42,44) providing EMI shielding, substantially hermetic sealing for a dry purge gas for low-temperature testing, and a dark environment. The sealing isolation of the wafer chuck (80) and test probe (30) pro ...


3
Boris Fishkin, Seiji Sato, Robert B Lowrance: Controlled environment enclosure and mechanical interface. Applied Materials, Thomason Moser & Patterson, July 4, 2000: US06082948 (39 worldwide citation)

A system for vacuum-processing objects such as electronic integrated circuit wafers comprises (a) a carrier for transporting the wafers under vacuum in a cassette, the cassette being supported on a movable wall that serves as a bottom cover member of the carrier; and (b) a processing machine having ...


4
Boris Fishkin, Seiji Sato, Robert B Lowrance: Controlled environment enclosure and mechanical interface. Applied Materials, Patterson & Streets L, December 16, 1997: US05697750 (22 worldwide citation)

A system for vacuum-processing objects such as electronic integrated circuit wafers comprises (a) a carrier for transporting the wafers under vacuum in a cassette, the cassette being supported on a movable wall that serves as a bottom cover member of the carrier; and (b) a processing machine having ...


5
Oskar U Vierny, Philip M Salzman: Controlled environment enclosure and mechanical interface. Applied Materials, Stephen R Seccombe, January 3, 1995: US05378107 (11 worldwide citation)

Disclosed is a method for enabling the contents of a first chamber to be moved into a second chamber without exposing either chamber to elements making particulate-producing sliding contact. In one aspect of the invention, the method includes providing a carrier for a vertically spaced array of arti ...


6
Ronald R Pohl, Raymond Mach: Controlled environment enclosure. Venderbush Industrial Corporation, Basile and Hanlon, September 13, 1988: US04769962 (11 worldwide citation)

A controlled environment enclosure provides a dust-free atmosphere for manufacturing operations. The enclosure includes a frame formed of interconnected, horizontally and vertically extending, spaced frame members. An outer cover member is deployed over the sides and top of the interconnected frame ...


7
Boris Fishkin, Seiji Sato, Robert B Lowrance: Controlled environment enclosure and mechanical interface. Applied Materials, Moser Patterson & Sheridan, March 5, 2002: US06352403 (11 worldwide citation)

A system for vacuum-processing objects such as electronic integrated circuit wafers comprises (a) a carrier for transporting the wafers under vacuum in a cassette, the cassette being supported on a movable wall that serves as a bottom cover member of the carrier; and (b) a processing machine having ...


8
Folsom Max H: Method and apparatus for controlling gaseous environment. National Appliance Company, Klarquist Sparkman Campbell Leigh Hall & Whinston, November 19, 1974: US3848569 (7 worldwide citation)

A controlled environment enclosure such as an incubator for use in biological culture growth is provided with air circulation apparatus and a sensor for detecting the proportion of carbon dioxide within the enclosure. A control system is provided which initiates a supply of carbon dioxide to the enc ...


9
Philip C Theriault, Anthony O Lee, Christopher A Roth: Adjustable optical mounting and method. Raytheon Company, Renner Otto Boisselle & Sklar, July 20, 2010: US07760449 (1 worldwide citation)

A method of adjusting an optical system includes placing the optical system in a controlled environment enclosure, and adjusting an optical mount of the optical system while the optical system is in the controlled environment enclosure.


10
Theriault Philip C, Lee Anthony O, Roth Christopher A: Adjustable optical mounting and method. Raytheon Company, Theriault Philip C, Lee Anthony O, Roth Christopher A, PLATT Jonathan A, November 1, 2007: WO/2007/123594 (1 worldwide citation)

A method of adjusting an optical system includes placing the optical system in a controlled environment enclosure, and adjusting an optical mount of the optical system while the optical system is in the controlled environment enclosure.