1
Pankaj Dixit, Jack Sliwa, Richard K Klein, Craig S Sander, Mohammad Farnaam: Contact plug and interconnect employing a barrier lining and a backfilled conductor material. Advanced Micro Devices, Ashen Golant Martin & Seldon, November 28, 1989: US04884123 (172 worldwide citation)

A stable, low resistance contact is formed in a contact hole (16) through an insulating layer (14), e.g., silicon dioxide, formed on a surface of a semiconductor substrate (12), e.g., silicon, to a portion of a doped region (10) in said semiconductor surface. The contact comprises (a) an adhesion an ...


2
Pankaj Dixit, Jack Sliwa, Richard K Klein, Craig S Sander, Mohammad Farnaam: Contact plug and interconnect employing a barrier lining and a backfilled conductor material. Advanced Micro Devices, David W Collins, October 2, 1990: US04960732 (98 worldwide citation)

A stable, low resistance contact is formed in a contact hole (16) through an insulating layer (14), e.g., silicon dioxide, formed on a surface of a semiconductor substrate (12), e.g., silicon, to a portion of a doped region (10) in said semiconductor surface. The contact comprises (a) an adhesion an ...



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