1
William J Kaiser, Kristofer S J Pister, Oscar M Stafsudd, Phyllis R Nelson, Amit Burstein: CMOS integrated microsensor with a precision measurement circuit. The Regents of the University of California, Daniel L Dawes, August 19, 1997: US05659195 (182 worldwide citation)

Improved microsensors are provided by combining surface micromachined substrates, including integrated CMOS circuitry, together with bulk micromachined wafer bonded substrates which include at least part of a microelectromechanical sensing element. In the case of an accelerometer, the proof mass is ...


2
Kaiser William J, Pister Kristofer S J, Stafsudd Oscar M, Nelson Phyllis R, Burstein Amit: Cmos integrated microsensor with a precision measurement circuit. The Regents Of The University Of California, DAWES Daniel L, December 27, 1996: WO/1996/042111

Improved microsensors are provided by combining surface micromachined substrates (48), including integrated CMOS circuitry (50), together with bulk micromachined wafer bonded substrates (16) which include at least part of a microelectromechanical sensing element. In the case of an accelerometer (46) ...