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Peter Andrews, Brad Froemke, John Dunklee: Chuck with integrated wafer support. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, April 22, 2008: US07362115 (14 worldwide citation)

An improved chuck assembly with lift pins. The chuck assembly may have an outer periphery and an upper surface. The lift pins may be positioned within the periphery of the chuck assembly and may be capable of relative vertical movement with respect to the upper surface of the chuck assembly.


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Peter Andrews, Brad Froemke, John Dunklee: Chuck with integrated wafer support. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, March 30, 2010: US07688091 (1 worldwide citation)

An improved chuck with lift pins within a probe station. The chuck assembly may have an outer periphery and an upper surface. The lift pins may be positioned within the periphery of the chuck assembly and may be capable of relative vertical movement with respect to the upper surface of the chuck ass ...


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Andrews Peter, Froemke Brad, Dunklee John: Chuck with integrated wafer support. Cascade Microtech, July 1, 2005: TW200520910

An improved chuck with lift pins within a probe station. 1. A probe station comprising: (a) a chamber that at least partially encloses a chuck assembly therein; (b) said chuck assembly having an upper surface thereon suitable to support a wafer thereon; (c) a plurality of members located within the ...


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