1
Young O Kim, Mark A Lavin, Lars W Liebmann, Glenwood S Weinert: Automatic generation of phase shift masks using net coloring. International Business Machines Corporation, H Daniel Schnurmann, Schmeiser Olsen & Watts, May 23, 2000: US06066180 (42 worldwide citation)

According to the preferred embodiment, a method is provided for automatically coloring VLSI design elements for the purpose of assigning binary properties to the elements. The preferred method is particularly applicable for use generating phase shift mask designs from VLSI CAD datasets. The preferre ...


2
Young O Kim, Mark A Lavin, Lars W Liebmann, Glenwood S Weinert: Automatic generation of phase shift masks using net coloring. International Business Machines Corporation, H Daniel Schnurmann, Schmeiser Olsen & Watts, March 16, 1999: US05883813 (12 worldwide citation)

According to the preferred embodiment, a method is provided for automatically coloring VLSI design elements for the purpose of assigning binary properties to the elements. The preferred method is particularly applicable for use generating phase shift mask designs from VLSI CAD datasets. The preferre ...



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