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Lee Jong Chul, Park Sang Hyuck: Apparatus for treating thin film and method of treating thin film. Lg Philips Lcd, LG Electronics, August 16, 2006: TW200629391

An apparatus and method for treating a thin film on a substrate is presented. The substrate is loaded on a fixed stage adapted to receive the substrate. An energy source is aligned through a space in a gas shield so as to face a thin film on the substrate to be repaired after the substrate is loaded ...


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