61
Sogard Michael: A dynamic fluid control system for immersion lithography. Nikon Corporation, Sogard Michael, COSTANTINO Mario A, January 19, 2006: WO/2006/007111 (29 worldwide citation)

A dynamic fluid control system and method capable of reducing dynamic forces from the fluid on the last optical element (20) and substrate stage (14) caused by the motion of the immersion fluid. The system includes an imaging element (12) that defines an image and a stage (14) configured to support ...


62
Michael Binnard: Apparatus and methods for detecting tool-induced shift in microlithography apparatus. Nikon Corporation, Klarquist Sparkman, January 13, 2004: US06678038 (29 worldwide citation)

Apparatus and methods are disclosed for detecting and measuring a tool-induced shift in a microlithography apparatus (“stepper”). The apparatus and methods are set forth in the context of microlithography apparatus that include a wafer stage and a holding member to which the wafer is mounted for exp ...


63
Donald DeJager, Andrew F Kurtz, David Kessler, Leslie G Moore Jr: Illumination system for a film scanner. Eastman Kodak Company, Donald D Schaper, April 30, 1991: US05012346 (29 worldwide citation)

An illumination system for a film scanner is disclosed which comprises a light source and optics for providing a line of light on a film. Light transmitted through the film is imaged onto photosensor elements such as CCD arays. In order to obtain a high quality electronic image, a xenon light source ...


64
Michael Sogard: Environmental system including vacuum scavenge for an immersion lithography apparatus. Nikon Corporation, Oliff & Berridge, April 8, 2008: US07355676 (28 worldwide citation)

An environmental system controls an environment in a gap between an optical assembly and a device and includes a fluid barrier and an immersion fluid system. The fluid barrier is positioned near the device. The immersion fluid system delivers an immersion fluid that fills the gap and collects the im ...


65
Andrew J Hazelton, Hiroaki Takaiwa: Wafer table for immersion lithography. Nikon Corporation, Oliff & Berridge, November 27, 2007: US07301607 (28 worldwide citation)

Methods and apparatus allow a liquid to be substantially contained between a lens and a wafer table assembly of an immersion lithography system. According to one example, an exposure apparatus includes a lens and a wafer table assembly. The wafer table assembly has a top surface, and is arranged to ...


66
Alex Ka Tim Poon: Positioning device and exposure apparatus including the same. Nikon Corporation, Finnegan Henderson Farabow Garrett & Dunner L, September 14, 2004: US06791669 (28 worldwide citation)

A positioning device for positioning a wafer table and an exposure apparatus including the positioning device are disclosed. The positioning device includes a housing, a piezoelectric actuator, and a structure for moving the wafer table in a second direction. The piezoelectric actuator has a first a ...


67
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Paul Graupner, Jan Haisma, Nicodemus Hattu, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens, Bernard Gellrich: Lithographic apparatus and device manufacturing method. ASML Netherlands, Carl Zeiss SMT, Pillsbury Winthrop Shaw Pittman, June 9, 2009: US07545481 (27 worldwide citation)

The joint between the projection system element and its support comprises an inorganic layer or a direct bond and is thus liquid tight, which can prevent deformation by an immersion liquid. The joint can be made either warm or cold. Solders, glue, and glue protection can all be used in the formation ...


68
Stephen J Beale: Workpiece support and clamping means. DEK Printing Machines, Fay Sharpe Beall Fagan Minnich & McKee, October 20, 1992: US05157438 (27 worldwide citation)

Support means for a workpiece, such as for example a printed circuit board to be screen printed, comprise a plurality of parallel upright elongate members, upper ends of which engage the underside of the workpiece or components secured thereon. Armatures and electromagneto magnets are provided in a ...


69
Toru Takenouchi: Magazine for supplying a strip of photographic printing paper. Noritsu Kenkyu Center, Larson and Taylor, January 28, 1986: US04566785 (27 worldwide citation)

An improved detachable or replaceable magazine for supplying a strip of printing paper to a photographic printer or photographic processor is disclosed. The magazine includes a case, a cover turnably mounted on the case and a printing paper delivering port on the case, a reel supporting member adapt ...


70
Komori Shigehiro, Sakamaki Hisashi, Hattori Hiroyuki, Iida Toshihide, Miyamoto Koichi, Umezawa Kazumi: Automatic cut sheet feeding unit. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, November 18, 1975: US3919972 (27 worldwide citation)

An automatic cut sheet feeding device provided with a cut sheet box with an open top. The box is provided with a separation pawl facing the inside and located on each end of the upper side of the sheet feeding lateral side, the separation pawls being mounted to allow the box to move vertically to so ...