1
Richard E Huff, Miklos Perlaki: Membrane probe with automatic contact scrub action. Robert P Sabath, Edward Y Wong, April 17, 1990: US04918383 (145 worldwide citation)

An apparatus [10] for providing an automatic lateral scrubbing motion when a test membrane [22] engages a device under test (DUT) (not shown). Included are a fixed length flexure pivot assembly [30] and a pair of variable length flexure pivot assemblies [38]. Signal traces, signal trace terminals, a ...


2
Glenn J Leedy: Flexible tester surface for testing integrated circuits. Skjerven Morrill MacPherson Franklin & Friel, February 19, 1991: US04994735 (138 worldwide citation)

The individual transistor or logic unit testing is accomplished by a specially fabricated flexible tester surface made in one embodiment of several layers of flexible silcon dioxide, each layer containing vias and conductive traces leading to thousands of microscopic metal probe points on one side o ...


3
John K Logan: Ceramic microstrip probe blade. Gordon K Anderson, December 13, 1988: US04791363 (135 worldwide citation)

A microstrip probe blade which has a ceramic body (20) with a microstrip (26) on one side and a metalized ground plane (30) on the other. A straight needle (32) having a tapered end and a spherical tip is attached to the microstrip axially and protrudes from the body parallel to the microstrip such ...


4
Hugh W Littlebury: Method for parallel testing of semiconductor devices. Motorola, Joe E Barbee, Stuart T Langley, April 30, 1991: US05012187 (133 worldwide citation)

A method of testing unpackaged integrated circuits using a tester which is capable of testing a plurality of memories in parallel is provided. A membrane test head having a plurality of probe bumps thereon is provided wherein the probe bumps are coupled to the tester by microstrip transmission lines ...


5
Ryuichi Takebuchi: Probe apparatus and method of alignment for the same. Tokyo Electron Yamanashi, Oblon Spivak McClelland Maier & Neustadt, June 14, 1994: US05321352 (130 worldwide citation)

A probe apparatus for measuring electrical characteristics of chips arranged on a wafer comprises a probe card having probe needles and a rotary chuck for supporting the wafer. The chuck is supported on an XY stage. A stationary alignment bridge is provided with a stationary camera and a capacitance ...


6
Toshiki Hirano, Atsuo Kimura, Shinichiro Mori: Semi-conductor chip test probe and process for manufacturing the probe. International Business Machines, William D Sabo, Mark F Chadurjian, Thornton & Thornton, March 3, 1998: US05723347 (100 worldwide citation)

This discloses a probe structure which does not rely on cantilevered wire and which has controlled contact pressure between the probe contacts and the I/O pads on a semi-conductor chip and which comprises a plurality of conductive contact electrodes, electrically coupled to respective leads, formed, ...


7
Glenn J Leedy: Making and testing an integrated circuit using high density probe points. DRI Technology, Skjerven Morrill MacPherson Franklin & Friel, July 6, 1993: US05225771 (96 worldwide citation)

Individual transistor or logic unit testing is accomplished by a specially fabricated flexible tester surface made in one embodiment of several layers of flexible silicon dioxide, each layer containing vias and conductive traces leading to thousands of microscopic metal probe points on one side of t ...


8
Michael R Sigler: System for locating probe tips on an integrated circuit probe card and method therefor. Triple S Engineering, Dorr Carson Sloan & Peterson, November 12, 1991: US05065092 (91 worldwide citation)

A system for determining probe tip alignment for a probe card having a plurality of probes downwardly extending in a defined region of the probe card. Each probe has a tip assigned to a precise X, Y position in a plane spaced from the probe card. The assigned X, Y position is dictated by the topolog ...


9
Masao Yamaguchi: Method of identifying probe position and probing method in prober. Tokyo Electron, Oblon Spivak McClelland Maier & Neustadt, July 23, 1996: US05539676 (89 worldwide citation)

A prober for a semiconductor wafer includes a probe card mounted in a card mounting opening and having a plurality of probes. A work table for placing a wafer thereon and movable in X, Y, Z, and .theta. directions is disposed under the probe card. The work table includes a camera, and its operation ...


10
Gholamreza Majidi Ahy, David M Bloom: Millimeter-wave active probe. Stanford University, Ronald C Fish, January 8, 1991: US04983910 (74 worldwide citation)

A millimeter-wave active probe for use in injecting signals with frequencies above 50GHz to millimeter-wave and ultrafast devices and integrated circuits including a substrate upon which a frequency multiplier consisting of filter sections and impedance matching sections are fabricated in uniplanar ...