Katherina Babich
Katherina E Babich, Alessandro C Callegari, John J Connolly, Eugene J O Sullivan: Selective nanotube growth inside vias using an ion beam. International Business Machines Corporation, March 3, 2011: US20110048930-A1

A method of selectively growing one or more carbon nano-tubes includes forming an insulating layer on a substrate, the insulating layer having a top surface; forming a via in the insulating layer; forming an active metal layer over the insulating layer, including sidewall and bottom surfaces of the ...

Ana Londergan
Khurshid Syed Alam, Evgeni Gousev, Marc Maurice Mignard, David Heald, Ana R Londergan, Philip Don Floyd: Equipment and methods for etching of mems. Qualcomm Mems Technologies, Knobbe Martens Olson & Bear, September 2, 2010: US20100219155-A1

Etching equipment and methods are disclosed herein for more efficient etching of sacrificial material from between permanent MEMS structures. An etching head includes an elongate etchant inlet structure, which may be slot-shaped or an elongate distribution of inlet holes. A substrate is supported in ...

Belgacem Haba Belgacem (Bel) Haba
Belgacem Haba, Vage Oganesian, Kimitaka Endo: Robust multi-layer wiring elements and assemblies with embedded microelectronic elements. Tessera, Tessera, LERNER DAVID et al, May 7, 2009: US20090115047-A1

An interconnect element 130 can include a dielectric layer 116 having a top face 116b and a bottom face 116a remote from the top face, a first metal layer defining a plane extending along the bottom face and a second metal layer extending along the top face. One of the first or second metal layers, ...

Ana Londergan
Ion Bita, Evgeni Gousev, Ana Londergan, Xiaoming Yan: Etching processes used in mems production. Qualcomm MEMS Technologies, Knobbe Martens Olson & Bear, April 23, 2009: US20090101623-A1

The efficiency of an etching process may be increased in various ways, and the cost of an etching process may be decreased. Unused etchant may be isolated and recirculated during the etching process. Etching byproducts may be collected and removed from the etching system during the etching process. ...

Belgacem Haba Belgacem (Bel) Haba
Belgacem Haba, Yoichi Kubota, Teck Gyu Kang, Jae M Park: Fine pitch microcontacts and method for forming thereof. Tessera, Tessera, LERNER DAVID et al, January 3, 2008: US20080003402-A1

A method includes applying a final etch-resistant material to an in-process substrate so that the final etch-resistant material at least partially covers first microcontact portions integral with the substrate and projecting upwardly from a surface of the substrate, and etching the surface of the su ...

David Sherrer
Dan A Steinberg, Jasean Rasnake, David W Sherrer: Micromachined structures made by combined wet and dry etching. Shipley Company L L C, Jonathan D Baskin, November 15, 2005: US06964804

A micromachined structure, comprising: a substarte; a first wet etched pit disposed in the substrate; a second wet etched pit disposed in the substrate, the second pit extending into the substrate a greater depth than the first pit; and a dry pit disposed between, and adjacent to, the first and seco ...

Belgacem Haba Belgacem (Bel) Haba
Belgacem Haba, Irina Poukhova, Masud Beroz: Selective removal of dielectric materials and plating process using same. Tessera, Lerner David Littenberg Krumholz & Mentlik, July 6, 2004: US06758984

A metal is provided on a polymeric component and the component is subjected to a removal process such as plasma or liquid etching in the presence of an electric field. The etchant selectively attacks the polymer at the boundary between the metal and the polymer, thereby forming gaps alongside the me ...

Lilip Lau, William M Hartigan, John J Frantzen: Expandable stents and method for making same. Advanced Cardiovascular Systems, Fulwider Patton Lee & Utecht, June 6, 1995: US05421955 (656 worldwide citation)

The invention is directed to an expandable stent for implantation in a body lumen, such as an artery, and a method for making it from a single length of tubing. The stent consists of a plurality of radially expandable cylindrical elements generally aligned on a common axis and interconnected by one ...

Larry J Hornbeck: Spatial light modulator and method. Texas Instruments Incorporated, Carlton H Hoel, Robert O Groover, James T Comfort, January 28, 1986: US04566935 (489 worldwide citation)

Methods of fabrication of spatial light modulators with deflectable beams by plasma etching after dicing of a substrate into chips, each of the chips an SLM, is disclosed. Also, various architectures available with such plasma etching process are disclosed and include metal cloverleafs for substrate ...

Karl M Hink, Mark H Polczynski: Oximeter sensor assembly with integral cable and method of forming the same. Thor Technology Corporation, Andrus Sceales Starke & Sawall, August 20, 1991: US05041187 (444 worldwide citation)

An oximeter sensory assembly (40) includes a thin elongated flexible sheet-like strip (42) having an integral end portion (44) flexibly wrapping at least partially around a human body part (26), a plurality of electrical conductors (46-50) on the strip, and light emitting and receiving electrical co ...