1
Min Zhu, Guanghong Yang, Zheng Yuan, Song Xiang Wei: Instant sharing of documents on a remote server. Webex Communications, Fish & Richardson P C, November 25, 2003: US06654032 (968 worldwide citation)

An apparatus, method, and computer program for instant remote document sharing. In one embodiment, referred to as “remote document sharing,” a file on a remote server is converted to a “shared document” which is distributed to the members of a data conference for review. In another embodiment, refer ...


2
Min Zhu, Guanghong Yang, Zheng Yuan, Song Xiang Wei: Remote document serving. Webex Communications, Fish & Richardson P C, July 13, 2004: US06763501 (882 worldwide citation)

An apparatus, method, and computer program product for instant remote document serving. In one implementation, referred to as “remote document serving,” a remote file is converted to a “served document” which is distributed to a member of a data conference for review. In another implementation, refe ...


3
Nitin K Ingle, Jing Tang, Yi Zheng, Zheng Yuan, Zhenbin Ge, Xinliang Lu, Chien Teh Kao, Vikash Banthia, William H McClintock, Mei Chang: Methods of thin film process. Applied Materials, Kilpatrick Townsend and Stockton, May 10, 2011: US07939422 (125 worldwide citation)

A method for forming a semiconductor structure includes forming a plurality of features across a surface of a substrate, with at least one space being between two adjacent features. A first dielectric layer is formed on the features and within the at least one space. A portion of the first dielectri ...


4
Nitin K Ingle, Zheng Yuan, Paul Gee, Kedar Sapre: Chemical vapor deposition of high quality flow-like silicon dioxide using a silicon containing precursor and atomic oxygen. Applied Materials, Townsend and Townsend and Crew, November 2, 2010: US07825038 (106 worldwide citation)

Methods of depositing a silicon oxide layer on a substrate are described. The methods may include the steps of providing a substrate to a deposition chamber, generating an atomic oxygen precursor outside the deposition chamber, and introducing the atomic oxygen precursor into the chamber. The method ...


5
Abhijit Basu Mallick, Jeffrey C Munro, Linlin Wang, Srinivas D Nemani, Yi Zheng, Zheng Yuan, Dimitry Lubomirsky, Ellie Y Yieh: Method and system for improving dielectric film quality for void free gap fill. Applied Materials, Townsend and Townsend and Crew, June 2, 2009: US07541297 (90 worldwide citation)

A method of forming a silicon oxide layer on a substrate. The method includes providing a substrate and forming a first silicon oxide layer overlying at least a portion of the substrate, the first silicon oxide layer including residual water, hydroxyl groups, and carbon species. The method further i ...


6
Min Zhu, Zheng Yuan: Instantaneous remote control of an unattended server. WebEx Communications, Fish & Richardson P C, February 10, 2004: US06691154 (85 worldwide citation)

A method and a computer program product, implementing techniques for exchanging data in an unattended desktop sharing mode. The techniques include receiving a conferencing request, at a local unattended server, from a remote conferencing server; loading a desktop application on the local unattended ...


7
Zheng Yuan, Steve Ghanayem, Randhir P S Thakur: Method of increasing the etch selectivity of a contact sidewall to a preclean etchant. Applied Materials, Townsend & Townsend and Crew, January 13, 2004: US06677247 (76 worldwide citation)

A method of forming a contact in an integrated circuit between a first metalization layer and a silicon substrate. In one embodiment the method comprises forming a premetal dielectric layer over the silicon substrate, etching a contact hole through the premetal dielectric layer and then forming a th ...


8
Min Zhu, Jian Shen, Steven Li, Guanghong Yang, Bin Zhao, Shi Yan, Zheng Yuan: Distributed network system architecture for collaborative computing. WebEx Communications, Orrick Herrington & Sutcliffe, October 31, 2006: US07130883 (75 worldwide citation)

A distributed collaborative computer system is provided that comprises a plurality of server computers interconnected via a high-speed link. Client computers can connect to any available server computer and start or join a conference hosted on either the server computer to which the client computer ...


9
Karthik Janakiraman, Nitin Ingle, Zheng Yuan, Steven Gianoulakis: Gas distribution showerhead. Applied Materials, Townsend and Townsend and Crew, September 21, 2004: US06793733 (55 worldwide citation)

A gas distribution showerhead for use in a semiconductor fabrication process features a face plate having gas outlet ports in the form of elongated slots or channels. The use of elongated gas outlet ports in accordance with embodiments of the present invention substantially reduces the incidence of ...


10
Zheng Yuan, Reza Arghavani, Ellie Y Yieh, Shankar Venkataraman: Low-thermal-budget gapfill process. Applied Materials, Townsend Townsend Crew, August 8, 2006: US07087497 (42 worldwide citation)

A low-thermal-budget gapfill process is provided for filling a gap formed between two adjacent raised features on a strained-silicon substrate as part of a shallow-trench-isolation process. An electrically insulating liner is deposited using atomic-layer deposition and polysilicon is deposited over ...