1
Kenji Tochigi, Yoshiaki Hanyu, Yutaka Hiratsuka: Laser Raman microprobe. Hitachi, Antonelli Terry & Wands, May 6, 1986: US04586819 (120 worldwide citation)

A laser Raman microprobe separates a laser beam reflected by a sample and a Raman scattered light generated by the sample by a filter which transmits or reflects a light in a predetermined wavelength region including a wavelength region of the reflected laser beam and applies only the Raman scattere ...


2
Masayoshi Ezawa, Shigeru Wakana, Akira Misumi, Yoshifumi Tomita, Yutaka Hiratsuka: System for measuring foreign materials in liquid. Hitachi, Antonelli Terry & Wands, October 25, 1988: US04779451 (36 worldwide citation)

A system for measuring a foreign material in a liquid, includes a sampling section, vacuum deaerators, foreign material measuring sensors. The sampling section prepares a sample liquid containing various foreign materials having particles of different sizes and numbers and a calibration standard liq ...


3
Hisajiro Osada, Yutaka Hiratsuka, Masahiro Watanabe: Plasma monitoring method and plasma monitor. Hitachi, Antonelli Terry & Wands, September 17, 1985: US04541718 (20 worldwide citation)

A plasma monitoring method and a plasma monitor in a dry process which utilizes a plasma. Among a large number of chemical species which constitute the plasma, one or two specified chemical species suited to grasp the situation of the dry process has/have its/their plasma light/lights detected so as ...


4
Yutaka Hiratsuka, Tadahiro Ohmi, Junichi Murota, Yoshio Fujisaki, Masato Noda, Yoshimitsu Kitada, Terutaka Sahara: Draft chamber. Ohmi Tadahiro, Hitachi Plant Engineering & Construction, Oliff & Berridge, December 11, 1990: US04976815 (18 worldwide citation)

A draft chamber is located within a clean room for sequentially immersing and processing carriers such as silicone wafers in a plurality of solution vessels provided in the draft chamber. In the draft chamber, a first air flow moves in a substantially horizontal direction from the front portion of t ...


5
Kenji Tochigi, Yoshiaki Hanyu, Yutaka Hiratsuka: Laser Raman spectrophotometry system and adjustment thereof. Hitachi, Antonelli Terry & Wands, March 19, 1985: US04505586 (12 worldwide citation)

A laser Raman spectrophotometry system for analyzing a sample material by measuring spectrum of Raman scattering produced by the sample under irradiation of laser light includes a laser light source for excitation of luminescence in addition to a laser light source for the excitation of the Raman sc ...


6
Hisajiro Osada, Yutaka Hiratsuka: Plasma monitor. Hitachi, Antonelli Terry & Wands, February 11, 1986: US04569592 (11 worldwide citation)

A plasma monitor which measures the distribution of particular chemical species (atom, molecule, ion) in plasma generated inside an instrument making use of the plasma. Laser light having a particular wavelength is radiated to the particular chemical species so as to let it generate fluorescence. Th ...


7
Yutaka Hiratsuka, Tadashi Akiyama: Cleaning tank. Dan Science, January 23, 1996: US05485861 (8 worldwide citation)

A cleaning tank defining therein a cleaning chamber adapted to receive an article to be cleaned and having an upper opening for carrying the article into and out of the cleaning chamber, a plurality of small holes provided in the bottom wall of the cleaning chamber and communicated with an outlet po ...


8
Asao Nakano, Yutaka Hiratsuka: Soft X-ray generator. Hitachi, Antonelli Terry & Wands, January 21, 1986: US04566116 (5 worldwide citation)

A soft X-ray generator comprises an electron gun and an anode which are disposed in individual vacuum containers, respectively but are interconnected by a conduit provided with an electron lens so that an electron beam generated from the electron gun is guided through the conduit on the anode in a f ...


9
Masayoshi Ezawa, Shigeru Wakana, Akira Misumi, Yoshifumi Tomita, Yutaka Hiratsuka: System for measuring foreign materials in liquid. Hitachi, Antonelli Terry & Wands, January 2, 1990: US04890481 (4 worldwide citation)

A system for measuring a foreign material in a liquid, includes a sampling section, vacuum deaerators, foreign material measuring sensors. The sampling section prepares a sample liquid containing various foreign materials having particles of different sizes and numbers and a calibration standard liq ...