Katsuyuki MusakaAn electrolytic processing apparatus is used to remove a metal film formed on a surface of a substrate. The electrolytic processing apparatus includes a feeding electrode 31 for feeding electricity to a metal film 6 on a substrate W, a processing electrode 32 for processing the metal film 6, a subst ...
Katsuyuki MusakaAn electrolytic processing apparatus can planarize uniformly over an entire surface of a substrate under a low pressure without any damages to the substrate. The electrolytic processing apparatus has a substrate holder configured to hold and rotate a substrate having a metal film formed on a surface ...
Katsuyuki MusakaAn electrolytic processing method is used to remove a metal film formed on a surface of a substrate. The electrolytic processing method includes providing a feeding electrode 31 and a processing electrode 32 on a table 12, providing an insulating member 36 between the feeding electrode and the proce ...
A reactant gas ejector head enables a process gas mixture of a uniform concentration and composition to be delivered to the surface of a substrate in a stable and uniform thermodynamic state by preventing premature reactions to occur along the gas delivery route. The reactant gas ejector head compri ...
A reactant gas ejector head in a thin-film vapor deposition apparatus includes at least two reactant gas inlet passages for introducing reactant gases, a gas mixing chamber for mixing reactant gases introduced from the reactant gas inlet passages, and a nozzle disposed downstream of the gas mixing c ...
An actively controlled automotive suspension system employs a factor representative of self-induced attitude change creative factor as a correction factor in attitude regulating suspension control. Suspension characteristics is controlled on the basis of rolling and/or pitching energy representing p ...
A positive displacement liquid-delivery apparatus includes a positive displacement pump
A wheeled vehicle is equipped with a feedforward steering control system which steers the vehicle through front or rear road wheels in accordance with a driver's steering input such as an angular displacement of a steering wheel, and a negative feedback system which senses a turning behavior of the ...
A method of controlling an automotive vehicle is disclosed whereby a steering characteristic of the vehicle is automatically adjustable to a feature of the driver's steering the vehicle. The feature of the driver's steering the vehicle is detected in terms of a driver's technique or habit in manipul ...
In addition to a conventional steering system for steering a vehicle through the front wheels in accordance with an angular displacement of the steering wheel, the vehicle is equipped with a negative feedback steering control system which steers the vehicle through the front or rear wheels in accord ...
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