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Yu Chong Tai, Po Jui Chen, Damien C Rodger, Mark S Humayun: Microfluidic valve having free-floating member and method of fabrication. California Institute of Technology, Vista IP Law Group, October 13, 2009: US07600533 (26 worldwide citation)

Micro check valves having a free-floating member for controlling flow of fluid in microfluidic and biomedical applications and methods of fabrication. A micro check valve includes a valve seat, a valve cap that contacts the valve seat and an untethered floating member that can move between the valve ...


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Yu Chong Tai, Denny K Miu, Weilong Tang, Viktoria Temesvary, Shuyun Wu: Bulk micromachined inductive transducers on silicon. California Institute of Technology, Norman R Klivans, E Eric Hoffman, Skjerven Morrill MacPherson Franklin & Friel, March 3, 1998: US05724015 (26 worldwide citation)

A bulk micromachined inductive transducer on single crystal silicon. The bulk micromachined micro-device has movable parts integrated with electromagnetically-driven microactuators for moving the parts. The integrated electromagnetic microactuators of the present micromachine move the movable parts ...


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Yu Chong Tai, Fukang Jiang, Chihming Ho: Flexible skin incorporating mems technology. California Institute of Technology, Fish & Richardson P C, June 6, 2000: US06071819 (25 worldwide citation)

A flexible skin formed of silicon islands encapsulated in a polyimide film. The silicon islands preferably include a MEMS device and are connected together by a polyimide film (preferably about 1-100 .mu.m thick). To create the silicon islands, silicon wafers are etched to a desirable thickness (pre ...


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Damien C Rodger, Mark Humayun, Yu Chong Tai, James D Weiland: Parylene-based flexible multi-electrode arrays for neuronal stimulation and recording and methods for manufacturing the same. University of Southern California, California Institute of Technology, Townsend and Townsend and Crew, Gerald T Gray, February 5, 2008: US07326649 (24 worldwide citation)

Method for manufacturing a parylene-based electrode array that includes an underlying parylene layer, one or more patterned electrode layers comprising a conductive material such as a metal, and one or more overlying parylene layers. The overlying parylene is etched away or otherwise processed to ex ...


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Yu Chong Tai, Tseng Yang Hsu, Wen H Hsieh: Thin film electret microphone. California Institute of Technology, Fish & Richardson P C, October 19, 2004: US06806593 (24 worldwide citation)

An electret formed by micro-machining technology on a support surface, including a self-powered electret sound transducer, preferably in the form of a microphone, formed by micro-machining technology. Each microphone is manufactured as a two-piece unit, comprising a microphone membrane unit and a mi ...


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Yu Chong Tai, Siyang Zheng, Henry Lin, Ram Datar, Richard Cote: Uses of parylene membrane filters. California Institute of Technology, University of Southern California, Townsend and Townsend and Crew, December 7, 2010: US07846743 (20 worldwide citation)

The invention provides parylene membrane filters, filter devices and methods of making them and using them in the mechanical separation of cells and particles by size. The provision of parylene membrane filters with high figures of merit and finely controlled hole sizes allows the separation of cell ...


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Yu Chong Tai, Xing Yang, Charles Grosjean, Xuan Qi Wang: Micromachined parylene membrane valve and pump. California Institute of Technology, Fish & Richardson P C, March 2, 2004: US06699394 (20 worldwide citation)

A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms ...


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Jun Xie, Jason Shih, Yu Chong Tai: Integrated electrostatic peristaltic pump method and apparatus. California Institute of Technology, Foley & Lardner, August 15, 2006: US07090471 (18 worldwide citation)

An electrostatic fluid regulating device and methods. The device has a substrate. The device also has a first electrode coupled to the substrate. The device has a polymer based diaphragm. A second electrode is coupled to the diaphragm. A polymer based fluid chamber is coupled to the diaphragm. The d ...


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Yu Chong Tai, Xuan Qi Wang: Normally closed in-channel micro check valve. California Institute of Technology, Fish & Richardson P C, October 29, 2002: US06470904 (18 worldwide citation)

In an embodiment, a check valve assembly may include an in-channel check valve connected between the front and rear portions of a channel attached to a silicon substrate. The channel may have a width between about 10 &mgr;m and about 400 &mgr;m, and the check valve may have a width between about 50 ...